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Work cells for clean room equipment

A technology of working unit and clean room, applied in the direction of electrical components, conveyor objects, transportation and packaging, etc., which can solve unbearable problems

Active Publication Date: 2019-08-20
ASYS AUTOMATIC SYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, in the case of the supply of coupling modules grouped statically around the periphery of the base module, as also in the transfer of substrates between these coupling modules, for the hand operation centrally arranged in the base module The device generates rather long oscillating or moving paths, which are no longer acceptable in terms of the possible working capacity of such a work unit requiring a high investment

Method used

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  • Work cells for clean room equipment
  • Work cells for clean room equipment
  • Work cells for clean room equipment

Examples

Experimental program
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Effect test

Embodiment Construction

[0027] Figures 1 to 4 The first operating unit 1 of the clean room system is shown in a roughly extremely simplified, partly still schematic illustration in terms of details. The first working unit 1 essentially consists of a base module 2 which centrally and statically has a manual operating device 3 for a planar substrate 4 . Around the base module 2 , in the radial access region of the hand-operated device 3 , are positioned peripherally a coupling module 5 , each having a feed opening at its end face facing the hand-operated device 3 . With respect to the first work unit 1 shown, the coupling modules 5 are formed in each case by transport containers in which the substrates 4 are arranged on top of each other at a distance such that the substrates 4 are arranged by the grippers 6 of the hand-operated device 3 . The material 4 is taken and the substrate 4 can be transferred by the hand-operated device 4.

[0028] In such a positioning, the coupling module 5 is carried by ...

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Abstract

A working unit (1) of a clean room installation, which has a central base module (2), a manual operating device (3) and has a pick-and-place for the manual operating device (3) rotatable around the base module (2). Use the swivel support (7) of the coupling module (5) in the area.

Description

technical field [0001] The working units in clean room installations are often constructed modularly and are themselves connected into groups, wherein the modules or working The cells are embodied encapsulated in mostly sluice-like transitions. Background technique [0002] In a simple base configuration, such a working unit consists of a central base module, to which connection modules, such as storage-, process-, sorting- and / or transfer modules, are butted around the periphery and arranged centrally on the base Hand-operated devices for the feeding and / or transfer of substrates in the module access the work cell. [0003] Depending on the area size of the mostly planar substrates, there is already a greater area requirement for the base module compared to plants in which substrates of smaller area size are processed. Furthermore, however, when a greater number of connection modules are to be joined peripherally to the base module, a base module with a larger diameter is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/677
CPCH01L21/67178H01L21/67769
Inventor K.许格勒
Owner ASYS AUTOMATIC SYST