Micropore detection instrument

A detector and micro-hole technology, applied in the field of micro-hole detectors, can solve the problem of inability to determine the penetration state of each micro-hole on the workpiece

Inactive Publication Date: 2016-10-12
WUZHOU OKA OPTICAL INSTR
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a micropore detector, which can solve the problem that the

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Example Embodiment

[0021] The present invention will be described in further detail below with reference to the embodiments of the drawings:

[0022] figure 1 The shown microhole detector mainly includes a base 1, a stage, a light-shielding tube 4, a camera 7, a frame 8, a light source and a heat dissipation device. The base 1 of this embodiment is a T-shaped shell. Three adjusting feet 12 are installed on the bottom of the base 1. A frame 8 and a detection station frame 1-1 are fixed on the top of the base 1, and the detection station frame 1- A stage is installed between 1 and the base 1. The stage of this embodiment is a rotating stage 3 hinged between the inspection station frame 1-1 and the base 1. The rotating stage 3 is provided with four A workpiece placement hole for placing the workpiece 2 to be inspected. The camera 7 is installed on the upper part of the upright frame 8. A light-shielding tube 4 is connected between the lens of the camera 7 and the inspection station frame 1-1, a defoc...

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Abstract

The invention discloses a micropore detection instrument, and relates to the technical field of optical detection equipment. The micropore detection instrument comprises a base and an object table and a rack which are installed on the base. The rack is provided with a camera. A workpiece to be detected is arranged on the object table. A light source is arranged below the detection position of the workpiece to be detected. The workpiece to be detected is arranged in an imaging light path of the light source and the lens of the camera in detection. The lens is provided with an out-of-focus adjustment ring. An image space telecentric flat field lens is used as the lens. A light shading cylinder is arranged between the lens and the detection position. The light source is arranged in the base. The light source is a light-emitting member which is installed in a heat radiation base of which one end is inserted in the base. The other end of the heat radiation base is provided with heat radiation fins which are exposed out of the base. The problems that the transparent state of all the micropores of the workpiece cannot be judged by the existing micropore detection instrument in one time of imaging can be solved.

Description

technical field [0001] The invention relates to the technical field of optical detection equipment, in particular to a micropore detection instrument. Background technique [0002] There are many tiny through-holes on microporous workpieces such as microporous membranes. The pore throughput of these microporous workpieces has a great impact on their performance. In order to ensure the quality of the workpiece, a micropore detector is required to detect the micropores on the workpiece. The penetration situation, that is, to detect which of the numerous micro-holes on the workpiece are full-through holes, which are half-through holes and which are not. The diameter of the micropores on the microporous workpiece is mostly about 8 μm. The hole with a diameter of 8 μm is a full-through hole, and the hole with a diameter much smaller than 8 μm is a half-through hole or a non-through hole. Therefore, the existing micropore detection method is, These microholes are enlarged and ima...

Claims

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Application Information

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IPC IPC(8): G01D21/00
CPCG01D21/00
Inventor 张景华
Owner WUZHOU OKA OPTICAL INSTR
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