A high-precision fused silica microshell resonant structure processing equipment

Abstract

Equipment for machining a high-precision fused-quartz micro shell resonant structure comprises an XYZ three-dimensional feed mechanism, a W-direction servo rotation mechanism, a forming mold and a high-temperature flame control system; the high-temperature flame control system comprises a high-temperature flame gun, a to-be-processed quartz sheet is fixedly disposed on the forming mold, the forming mold is fixedly connected with the W-direction servo rotation mechanism, the W-direction servo rotation mechanism is capable of driving the forming mold to synchronously rotate at a high speed, the XYZ three-dimensional feed mechanism and the W-direction servo rotation mechanism are used to achieve alignment between the to-be-processed quartz sheet and high-temperature flame ejected by the high-temperature flam gun. The equipment for machining the high-precision fused-quartz micro shell resonant structure is capable of substantially improving the processing precision of a fused quartz micro shell resonant structure, substantially improves the machining efficiency, and is also applicable to machine resonant structures made from multiple materials with multiple dimension scopes.

Description

technical field [0001] The invention belongs to the technical field of mechanical processing equipment, and in particular relates to a processing equipment with a resonance structure of a precision shell. Background technique [0002] The gyroscope is a sensor that measures the angular motion of the carrier in the inertial space, and is the basic core device of the inertial navigation and attitude measurement system. It has very important application value in precision guidance, unmanned systems, oil exploration, stable platforms, space vehicles and other fields. [0003] The overall performance and cost of the gyroscope are the fundamental factors that determine its development direction. With the development of shell vibrating gyroscope theory and the deepening research of micro gyroscope processing technology, the miniature shell vibrating gyroscope has become one of the most promising micro gyroscopes. The high performance of the micro-shell vibrating gyro is due to it...

AI Technical Summary

Problems solved by technology

[0006] In order to overcome the deficiencies of the existing glass blowing deformation processing technology, the present invention provides a high-precision fused silica micro-shell resonant structure processing equipment, which can significantly improve the processing accuracy of the resonant structure and improve the stability of the processing technology, and at the same time greatly improve Processing efficiency

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