A wide range, large working distance autocollimation device and method

Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to a wide-range and large-working-distance auto-collimation device and a wide-range and large-working-distance auto-collimation method. The wide-range and large-working-distance auto-collimation device is composed of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system. The large-working-distance auto-collimation method comprises the steps of: adjusting the reflecting mirror, so that a reflected light beam returns to the center of an image surface of the feedback imaging system; and utilizing an angular deflection measuring device on the reflecting mirror to obtain angular variation of the surface of a measured object. Since the reflecting mirror is additionally arranged on a traditional auto-collimation angle measuring system, the problem that measurement cannot be carried out because the reflected light of the measured object deviates from the measuring system can be avoided, and the method and the device have the technical advantages of increasing an auto-collimation working range at the same working distance, or the increasing the working distance in the same auto-collimation working range; in addition, by adopting the specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the method and the device further have the technical advantages of simple structure, low manufacturing cost, high measurement precision at low sampling frequency, and fast measurement.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, and in particular relates to an autocollimation device and method with a wide range and a large working distance. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of me...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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