Parameter Identification and Compensation Method of Circular Grating Eccentricity Error
A technology of eccentricity error and parameter identification, which is applied in the direction of using optical devices, instruments, measuring devices, etc., can solve the problems of troublesome construction of experimental devices, small number of data, increased hardware costs, etc.
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[0012] The objects and functions of the present invention and methods for achieving the objects and functions will be clarified by referring to the exemplary embodiments. However, the present invention is not limited to the exemplary embodiments disclosed below; it can be implemented in various forms. The essence of the description is only to help those skilled in the relevant art comprehensively understand the specific details of the present invention.
[0013] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, the same reference numerals represent the same or similar components, or the same or similar steps.
[0014] The invention provides a circular grating eccentricity error parameter identification and compensation method. The method is a self-calibration method of circular grating eccentricity parameters based on double reading heads. When the method is used for eccentricity parameter identif...
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