Anti-mechanical vibration mems accelerometer arrangement, related method, device and system
An accelerometer, mechanical technology, used in the measurement of acceleration, multi-dimensional acceleration measurement, velocity/acceleration/shock measurement, etc., can solve problems such as equipment idle, cost, missed deadlines, etc.
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[0022] The following description is provided to enable any person skilled in the art to make and use the invention, and is provided in the context of the patent application and its claims. Various modifications to the described embodiments will be readily apparent to those skilled in the art, and the general principles taught herein may be applied to other embodiments. Accordingly, the present disclosure is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and features described herein including modifications and equivalents, as defined by the appended claims . Note that the drawings are not to scale and are diagrammatic in nature in what is believed to best illustrate features of interest. Descriptive terminology may be used in connection with these descriptions, however, such terminology is employed with the intent to facilitate the reader's understanding and is not intended to be limiting. Furt...
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