Nozzles for 48-pair rod polysilicon reduction furnace

A technology of polysilicon and reduction furnace, applied in the direction of silicon compounds, inorganic chemistry, non-metallic elements, etc., can solve the problems of increasing the complexity of the temperature field and flow field of the reduction furnace, and achieve the effect of sufficient reduction reaction and uniform distribution.
CN106865551BActive Publication Date: 2017-12-19ASIA SILICON QINGHAI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
ASIA SILICON QINGHAI
Publication Date
2017-12-19

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Abstract

The invention provides a nozzle for polycrystalline silicon reduction furnaces with 48 pairs of sticks. The nozzle belongs to the production field of polycrystalline silicon. The nozzle mainly comprises a cylinder core. The core consists of a first inner tube and a first outer tube. The first outer tube is set and covered on the first inner tube. The first inner tube comprises a main channel. The flow area of the air outlet of the main channel is smaller than the air inlet. The gap between the first outer tube and the first inner tube forms an auxiliary channel. The core is installed on a chassis through an interconnecting piece. Due to the flow area of the air inlet is larger than the flow area of the air outlet, air is passing through the main channel with an increasingly faster speed and eventually reaches the top of the reduction furnace. After passing through the auxiliary channel, a part of the air in the auxiliary channel gets to the middle of the reduction furnace, and the other part of the air gets to the bottom of the reduction furnace through a plurality of side vent holes on the first outer tube. The material gas can be evenly distributed in the entire reduction furnace, which leads to the fully performing of the reduction reaction.
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Description

technical field

[0001] The invention relates to the field of polysilicon production, in particular to a nozzle for a 48-pair polysilicon reduction furnace and the polysilicon reduction furnace. Background technique

[0002] At present, more than 85% of the world's polysilicon is produced by the improved Siemens method. The improved Siemens method is a chemical method. Firstly, metallurgical silicon (purity required to be above 99.5%) is synthesized with hydrogen chloride (HCl) to produce trichlorosilane gas (SiHCl3, hereinafter referred to as TCS), which is easy to purify, and then the TCS is rectified and purified. , and finally convert the high-purity TCS into high-purity polysilicon by reduction reaction and chemical vapor deposition (CVD).

[0003] The reduction reaction needs to be carried out in the polysilicon reduction furnace. Generally, the mixed material gas of hydrogen and TCS is passed into the reduction furnace through the chassis, and the reduction reaction o...

Claims

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