Transfer apparatus, transfer method, exposure apparatus, and device manufacturing method

Abstract

Disclosed is a transfer apparatus which is provided with a first supporting section (3), which supplies a gas to one surface of a substrate, and which can float and support the substrate by means of the gas; a second supporting section (400), which can support said surface of the substrate; a drive section (402), which moves the first supporting section and / or the second supporting section, and which arranges the first and the second supporting sections in the first direction by having the supporting sections close to or in contact with each other; and a transfer section, which moves the substrate supported by the first supporting section or the second supporting section to the other supporting section along the first direction, said first supporting section and second supporting section being arranged by the drive section.

Description

[0001] This application is a divisional application of a patent application with an application date of February 17, 2011, an application number of 201180009815.0, and an invention title of "transfer device, transfer method, exposure device, and component manufacturing method". technical field [0002] The present invention relates to a conveying device, a conveying method, an exposure device, and a device manufacturing method. [0003] This application claims priority based on U.S. Provisional Application Nos. 61 / 305,355 and 61 / 305,439 filed on February 17, 2010, and the contents thereof are incorporated herein. Background technique [0004] In the process of electronic components such as flat panel displays, processing equipment for large substrates such as exposure equipment and inspection equipment is used. In the exposure step and the inspection step using these processing apparatuses, a transfer apparatus as disclosed in the following patent documents for transferring ...

AI Technical Summary

Problems solved by technology

If the substrate after the transfer is misplaced or deformed, for example, in the exposure device, there will be a problem of exposure failure such as that the predetermined exposure cannot be performed on the appropriate and correct position on the substrate.

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