Novel micro ball sensor for sensing space environment changes and manufacture method thereof

A space environment and sensor technology, which is applied in the direction of instruments, measuring devices, fluid velocity measurement, etc., can solve the problems of large volume, limited environmental conditions, and slow response time, so as to improve sensitivity and range, realize layout and measurement, and reduce The effect of overall size

Active Publication Date: 2017-06-23
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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Problems solved by technology

The traditional method of measuring the change of flow velocity uses a hot wire flow velocity sensor of mechanical parts, but this device is bulky and easy to wear
In recent years, ultrasonic anemometers based on ultrasonic propaga

Method used

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  • Novel micro ball sensor for sensing space environment changes and manufacture method thereof
  • Novel micro ball sensor for sensing space environment changes and manufacture method thereof
  • Novel micro ball sensor for sensing space environment changes and manufacture method thereof

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Embodiment Construction

[0033] The present invention will be further explained below in conjunction with the accompanying drawings.

[0034] The novel micro-spherical sensor for sensing changes in the spatial environment of the present invention includes an outer sphere 1 and a microgroove 2, the microgrooves 2 are evenly distributed on the outer surface of the outer sphere 1 with the center of the outer sphere 1 as the center point, and nitrogen is deposited in the microgroove 2 A silicon nitride thin layer 3, polyimide 4 is deposited on the upper surface of the silicon nitride thin layer 3, an intermediate layer 5 is etched on the polyimide 4, and an upper lining layer 6 is processed on the upper surface of the intermediate layer 5. One end of the micro-beam 8 is fixed vertically to the surface of the microsphere 11 and then located at the center of the micro-groove 2 , and the other end of the micro-beam 8 is fixed to the middle layer 5 . The magnetron sputtering method is used to sputter polyviny...

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Abstract

The invention discloses a novel micro ball sensor for sensing space environment changes and a manufacture method thereof. The sensor simulates a biological behavior that lateral lines of a fish identify and locate prey underwater, that is, the exposed lateral line canals in the neuromasts in the lateral lines can mechanically sense the vibration generated during the swim of underwater animals. Positioning is performed according to the time and phase difference that a vibration wave reaches different neuromasts underwater, and a motion signal is converted into a physiological electric signal to be transmitted to sensory cells to sense stimulation such as external water flow changes, low-frequency vibration, and temperature changes. By using a polyvinylidene fluoride direct piezoelectric effect, a spatial airflow change is imitated and sensed and a spatial vibration source is positioned. A single ball sensing unit senses the vibration by using the polyvinylidene fluoride and directly converts the vibration into electric signals so as to calculate a spatial airflow magnitude and angle. A plurality of ball sensing units are arranged in an array, calculate the airflow magnitude and orientation according to the time and phase difference that the vibration wave reaches different sensing units, and improve the spatial airflow magnitude and orientation calculation accuracy.

Description

[0001] Technical field: [0002] The invention relates to a novel micro-spherical sensor capable of sensing changes in the space environment and a preparation method thereof, belonging to the field of bionic materials and intelligent structures. [0003] Background technique: [0004] Space velocity measurement and vibration element positioning are widely used in meteorological monitoring, biomedicine, aviation guidance and national defense weapons and equipment. The traditional method of measuring the change of flow velocity uses a hot wire flow velocity sensor of mechanical parts, but this device is bulky and easy to wear. In recent years, ultrasonic anemometers based on ultrasonic propagation and Doppler current meters based on the Doppler effect have appeared successively. These two types of flow meters have their own advantages. Low precision, slow response time and other reasons limit its application and promotion. [0005] Invention content: [0006] Aiming at the def...

Claims

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Application Information

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IPC IPC(8): G01P5/24G01S5/20G01S5/22
CPCG01P5/24G01S5/20G01S5/22
Inventor 胡捷姚新科彭瀚旻陈超
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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