Two-dimension ultra-precision positioning platform driven by voice coil motor

Abstract

The invention relates to a two-dimension ultra-precision positioning platform driven by a voice coil motor. A first motor is mounted on a transverse base, and an up-down movement platform is fixedly connected above the first motor and is driven by the first motor to move up and down along a first guide rail laid on a vertical base. A first grating ruler reading ruler mounted on the side face of the vertical base and a first grating ruler reading head mounted on the side face of the up-down movement platform are matched to measure the up-down displacement amount of the up-down movement platform. A backward and forward movement platform is positioned above the up-down movement platform and is driven by a second motor mounted on the up-down movement platform to move back and forth along a second guide rail laid on the up-down movement platform. A second grating ruler reading head mounted on the up-down movement platform and a second grating ruler reading ruler mounted on the side face of the backward and forward movement platform are matched to measure the backward and forward displacement amount of the backward and forward movement platform. The two-dimension ultra-precision positioning platform has the advantages of small transmission error, small platform size, high response speed, strong carrying capacity, high precision, high man-machine efficiency, etc., and can realize different control modes.

Description

technical field [0001] The invention relates to the technical field of precision ranging, in particular to a two-dimensional ultra-precise positioning platform driven by a voice coil motor. Background technique [0002] With the development of science and technology, the performance requirements for ultra-precision displacement platforms are getting higher and higher, and ultra-precision displacement platforms are becoming more and more miniaturized, commercialized, and precise. Ultra-precision displacement platforms are more and more widely used in: new machinery manufacturing, ultra-precision processing, bioengineering, integrated circuit manufacturing, medical science, scanning probe microscope, scanning tunneling microscope, optical adjustment, optical fiber docking. [0003] Ordinary ultra-precision displacement platforms mostly use stepping motors as the driving motor and ball screws as the matching structure of the transmission mechanism. When the same displacement an...

AI Technical Summary

Problems solved by technology

[0003] Ordinary ultra-precision displacement platforms mostly use stepping motors as the driving motor and ball screws as the matching structure of the transmission mechanism. When the same displacement and the same load are satisfied, the volume of the structure is relatively large. At the same time, the transmission of the ball screw There will be transmission errors in the mechanism, which will affect the positioning accuracy of the platform

Moreover, the speed response of the structure is slow and the bearing capacity is low

For displacement platform systems using other linear motors, the modules using linear motors are mostly one-dimensional modules, and their control systems are complex. It is difficult for people in non-control industries to achieve precise positioning control, and their control modes are fixed and their uses are limited. ,high cost

The structure and shape of the existing ultra-precision positioning platforms on the market are not perfect enough, and there are problems such as large size, difficult operation, shape initialization, and low man-machine performance.

Images