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Showerhead having a detachable high resistivity gas distribution plate

A technology of gas distribution plate and shower head, which is applied in the direction of electrical components, electrical solid devices, circuits, etc., and can solve the problem of expensive replacement process

Active Publication Date: 2017-12-15
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the inventors have observed that since the gas distribution plate is permanently bonded to the base, the entire showerhead assembly is replaced to replace the gas distribution plate, making the replacement process expensive

Method used

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  • Showerhead having a detachable high resistivity gas distribution plate
  • Showerhead having a detachable high resistivity gas distribution plate

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Embodiment Construction

[0015] Embodiments of a showerhead with a removable gas distribution plate are provided herein. In at least some embodiments, the showerheads of the present invention may advantageously allow for removal and replacement of the gas distribution plate, thereby providing a longer effective lifetime than conventional showerheads with permanently bonded gas distribution plates. longer life and a more cost-effective way to replace the gas distribution plate.

[0016] figure 1 A showerhead with a gas distribution plate is depicted according to some embodiments of the present disclosure. Showerhead 100 generally includes a body 102 , a gas distribution plate 104 , and a clamp 110 configured to removably couple the gas distribution plate to body 102 .

[0017] The body 102 includes a first side 150 , a second side 140 and a plurality of through holes 116 formed in the body 102 extending from the first side 150 to the second side 140 . A plurality of through holes 116 facilitate proc...

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Abstract

Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a base having a first side and a second side opposing the first side; a gas distribution plate disposed proximate the second side of the base, wherein the gas distribution plate is formed from a material having an electrical resistivity between about 60 ohm-cm to 90 ohm-cm; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed in a gap between the base and gas distribution plate.

Description

[0001] This application is PCT International Application No. PCT / US2015 / 035501, International Application Date is June 12, 2015, and Application No. 201580035584.9 has entered the Chinese national phase, entitled "Spray with detachable high-resistivity gas distribution plate The divisional application of the invention patent application of "Head". technical field [0002] Embodiments of the present disclosure generally relate to semiconductor processing equipment. Background technique [0003] Conventional showerheads utilized in semiconductor process chambers (eg, deposition chambers, etch chambers, etc.) typically include a gas distribution plate permanently bonded to a pedestal. The gas distribution plate is periodically replaced due to degradation caused by exposure to the plasma during the plasma process. However, the inventors have observed that since the gas distribution plate is permanently bonded to the base, the entire showerhead assembly is replaced to replace th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/687
CPCH01L21/6715H01L21/687H01L2221/683H01J37/3244H01J37/32807H01J37/3288
Inventor J·德拉罗萨H·诺巴卡施V·克尼亚齐克J·金W·李U·达杜
Owner APPLIED MATERIALS INC