A method and device for continuous punching of micro-parts assisted by an electromagnet

Abstract

The invention provides an electromagnet-assisted micro-part continuous blanking method and device. Laser shock wave induced when high-power-density nanosecond-grade short-pulse laser radiates an absorbing layer is used as a blanking tool and meanwhile as blank holder force acting on a metal film, and zero-interval high-precision blanking of micro-parts is achieved. When a spring is in a totally-stretched state, the distance between the lower end face of an abutting block and the upper end face of a pressing block is t, the interval between the groove face of the abutting block and the upper end face of a push-and-pull type electromagnet is t3, the thickness of the metal film is t2, the thickness of a strip is t1, t2<t<t1, t<t3, and it can be guaranteed that after blanking is ended, the micro-part is separated from the metal film; but the part, bearing action of the laser shock wave, of the absorbing layer is not still separated from the strip, the micro-part continues adhering to the strip after blanking is ended, under the action of a conveying mechanism, continuous blanking of micro-parts can be achieved.

Description

technical field [0001] The invention relates to the field of micro-manufacturing, in particular to a method and device for continuous punching of micro-parts assisted by electromagnets. Background technique [0002] Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System), developed on the basis of microelectronics technology, integrates technologies such as lithography, corrosion, thin film, LIGA, silicon micromachining, non-silicon micromachining and precision machining Manufactured high-tech electromechanical devices. Among them, micro parts are the core of MEMS. In order to ensure the high reliability and high precision of the MEMS system, various micro parts that make up the system need to have the characteristics of good mechanical properties, high shape and dimensional accuracy, and in industrial applications, micro parts need to achieve large Continuous batch production. [0003] Chinese patent ZL201010505882.9 proposes a method of using laser shock ...

AI Technical Summary

Problems solved by technology

However, this method can only cause micro-deformation of the parts and cannot achieve the punching often required in production, and it is difficult to realize the continuous processing of micro-parts

Chinese patent ZL201510048737.5 proposes a micro-punching device based on laser shock waves. An absorbing layer, a mask and a water film are placed on the metal film in sequence. The mask hole is similar in shape to the cutting hole of the die insert. The water-passing film is irradiated on the mask and the absorbing layer respectively. Under the action of the specific contour shock wave and the cut-off die hole of the die insert, the metal film and the top block move downward at the same time, and the metal film is cut off. At the same time, a specific Shaped flat micro-parts, but this invention cannot realize continuous blanking of micro-parts

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