Diamond cutter cutting edge contour quality ultra-precision measurement device

Abstract

The invention discloses a diamond cutter cutting edge contour quality ultra-precision measurement device. A left-right moving guide rail A, an up-and-down moving guide rail A and a front-rear moving guide rail of the device are used for achieving ten-micron eccentric adjustment of an atomic force scanning head and a diamond cutter; a left-right moving guide rail B and a front-rear moving guide rail B are used for achieving ten-micron eccentric adjustment of an optical microscope and the diamond cutter; a three-dimensional precision pose adjusting mechanism is used for achieving submicron eccentric adjustment of the diamond cutter and an atomic force scanning probe; and an ultra-precision air static pressure rotary shaft is used for achieving measurement of a diamond cutter full cutting edge sharpness and arc waviness. The diamond cutter cutting edge contour quality ultra-precision measurement device can effectively control the influence of the vibration of an ultra-precision shaft androtation errors on measurement results, and the diamond cutter cutting edge sharpness, arc waviness, cutting edge micro openings and cutting edge surface roughness measurement efficiency are remarkably improved.

Description

technical field [0001] The invention belongs to the technical field of ultra-precise measurement, and in particular relates to an ultra-precise measurement device for the profile quality of a diamond tool edge. Background technique [0002] As ultra-precision machining is a key technology for modern high-tech warfare, high-tech industry and cutting-edge technology development. For ultra-precision machining, tools that meet certain quality requirements are essential. As the only tool that can meet the requirements of ultra-precision cutting, the evaluation and measurement technology of high-precision diamond tools is an important supporting technology for ultra-precision cutting. The development of its evaluation and measurement can not only provide comprehensive evaluation of tool quality in the process of ultra-precision cutting , Judgment and monitoring provide technical support, and also provide guidance for tool manufacturing technology. Experimental research on ultra-...

AI Technical Summary

Problems solved by technology

However, the above-mentioned announced or published measurement methods are all measured on the existing commercial atomic force microscope (AFM) measurement platform, which has the following shortcomings: the commercial AFM measurement platform has a small operating space, and it is difficult to adjust during the measurement process, resulting in low measurement efficiency; Ultra-precision The rotary shaft system is placed horizontally on the atomic force platform, the vibration and rotation error of the shaft system will significantly affect the measurement results

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