A reflective airy ring diffraction grating has a laminated structure and sequentially comprises a substrate layer (2), a metal reflective film layer (3), a semipermeable and semireflective film layer (4) and an antireflection film layer (1) from the top down, wherein the metal reflective film layer is formed by splicing two paired different metal reflective film layers (5 and 6) one by one at intervals in circular and coaxial annular ways; and the refractive index of the semipermeable and semireflective film layer is between the refractive indexes of the two paired metal reflective film layers. The reflective airy ring diffraction grating improves the light intensity uniformity and the boundary sharpness of a focal plane by changing the amplitude and the phase distribution of incident light, is applied to laser operation, laser precise processing and laser irradiation, has very obvious effects of improving the operation precision, the processing precision and the irradiation uniformity, and solves the problem that the precision and the uniformity are poor because a matched grating is not adopted in the fields over the years.