A
silicon wafer transport dispatching method includes the following steps: receiving
silicon wafer production tasks, acquiring real-time status data of each production device, and generating an initial task
queue; based on the initial task
queue and a real-time digital map of the workshop, allocating optimal paths to transport devices and issuing execution instructions; controlling the transport devices to move along the optimal paths, and collecting real-
time information on the position, status, and environmental obstacles of the transport devices, and autonomously performing
obstacle avoidance; when the
silicon wafer arrives at the target device, performing identity
verification and equipment
handover confirmation; monitoring abnormal events during the transport process in real time, and executing corresponding handling methods according to the
abnormality level; generating production reports based on
task completion status and yield data, and feeding the data back to the
manufacturing execution system. By collecting real-time equipment status and workshop
road condition information, combined with intelligent scheduling algorithms and dynamic path planning, the method achieves rapid task allocation and efficient transport, and performs hierarchical response and
global optimization when abnormalities occur.