A kind of array substrate and its preparation method, display device

Abstract

Embodiments of the present invention provide an array substrate, a preparation method thereof, and a display device, which relate to the field of display technology, and can solve the problem that multiple thin film transistors in an existing array substrate require different oxygen-containing environments due to different application requirements, and it is difficult to balance multiple TFTs at the same time. The problem of the stability of the work of a thin film transistor. It includes a base substrate, and further includes a first buffer layer, an oxygen barrier pattern, and a second buffer layer sequentially arranged on the base substrate, and a first thin film transistor and a second thin film transistor arranged on the second buffer layer, the first The orthographic projection of the channel region of the thin film transistor on the base substrate is located within the boundary range of the orthographic projection of the oxygen barrier pattern on the base substrate. Wherein, the oxygen content of the first buffer layer is higher than the oxygen content of the second buffer layer.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an array substrate, a preparation method thereof, and a display device. Background technique [0002] Compared with the conventional back channel etch (BCE) and etch stop (ESL) thin film transistors, the top gate structure type oxide thin film transistor has the following advantages: it significantly reduces the parasitic capacitance, which is more conducive to the realization of good driving Effect; it can reduce the production size, which is more conducive to the realization of high-resolution display requirements; it can reduce the thickness of the gate insulating layer, which is conducive to further reducing the overall production thickness; it can achieve more stable electrical characteristics of thin film transistors, thereby Improve the reliability of the display panel. [0003] As for the driving TFT and the switching thin film transistor (SwitchTFT) that realiz...

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Problems solved by technology

[0004] Embodiments of the present invention provide an array substrate, a preparation method thereof, and a display device, which can solve the problem that multiple thin film transistors in an existing array substrate have different oxygen-containing environments due to different application requirements, and it is difficult to balance the work of multiple thin film transistors at the same time. problem of stability

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