Inspection system, method for controlling inspection device, and computer-readable storage medium
A technology of inspection system and control method, applied in the direction of measuring device, optical device, testing of machine/structural components, etc., can solve the problems of difficulty in confirming settings, inability to carry out such confirmation, information time-consuming and labor-intensive, etc.
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no. 1 example >
[0059] figure 1 An example of the hardware configuration of the substrate inspection system 9 of this embodiment is shown. The board|substrate inspection system 9 of this embodiment is comprised in which the teaching terminal 1, the server 2 for data management, and the board|substrate inspection apparatus 3 are mutually connected via the communication line.
[0060] As the teaching terminal 1, there is typically a stationary terminal including an output unit 101 such as a display monitor, an input unit 102 such as a keyboard and a mouse, a memory 103 such as a RAM, and a processing unit 104 such as a CPU, but it may also be a mobile terminal, a tablet type The terminal may also be configured integrally with the inspection device 3 .
[0061] The teaching terminal 1 is not only applied to the creation of the inspection program used in the inspection device 3 (including corrections, the same below), and the setting of the inspection content data (including changes, the same be...
no. 2 example >
[0103] based on Figure 9 ~ Figure 13 Another example of the board|substrate inspection system 9 of this invention is demonstrated. It should be noted that the basic structure of the substrate inspection system 9 of this embodiment is the same as that of the substrate inspection system 9 of the above-mentioned first embodiment, and there are many common parts, so the same reference numerals are assigned to such parts. Description omitted.
[0104] Such as Figure 9 As shown, the substrate inspection system 9 of this embodiment is based on the structure of the substrate inspection device of the first embodiment, and a simulation inspection processing unit 16 is set in the processing unit of the teaching terminal 1 . The function of the simulation inspection processing unit 16 is to perform a simulation inspection on the supplied image data based on the arbitrarily selected revised inspection content data, and to provide the inspection result to the UI control unit 11 .
[01...
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