Coating liquid supply device
A technology for supplying device and coating liquid, which is applied in the direction of surface coating liquid device, distribution device, liquid flow control device, etc., which can solve problems such as time-consuming, difficult to remove bubbles, and consumption of coating liquid
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[0063] Hereinafter, the coating liquid supply apparatus which concerns on embodiment of this invention is demonstrated concretely based on drawing. In addition, the coating liquid supply apparatus of this invention is not limited to the apparatus shown in the following embodiment, It can change suitably and implement in the range which does not change the idea of invention.
[0064] Here, in the coating liquid supply device of this embodiment, as shown in the drawing, as a plurality of coating liquid tanks for storing the coating liquid X, a first coating liquid tank 10A and a second coating liquid tank 10A are used. Two coating liquid tanks 10A, 10B constituted by the tank 10B.
[0065] Next, the vacuum device 20 is installed on the top of each coating liquid tank 10A, 10B by using the suction pipe 21, and the above-mentioned vacuum device 20 sucks the air in the above-mentioned respective coating liquid tanks 10A, 10B, and First and second on-off valves 22a, 22b are provi...
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