Manufacturing method of curved micro-lens array of which focal length varies with spatial distribution
A technology of microlens array and spatial distribution, which is applied in the production field of curved surface microlens array, can solve the problems of high production cost, unsuitable for mass production, expensive rotatable and movable laser emission source, etc., and achieve low cost and optimal control , the effect of simple steps
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[0025] The invention discloses a manufacturing method of a curved surface microlens array whose focal length varies with spatial distribution, such as figure 1 As shown, the following process steps are included:
[0026] 1. Take a glass sheet with a flat surface as the substrate, wash the glass sheet with water and acetone, place it in an oven, and bake it at 130°C for 10 minutes to remove water vapor and residual acetone. After baking, perform oxygen plasma treatment. Increase the surface energy of the glass sheet.
[0027] 2. Spin-coat the positive photoresist (AZ4620) on the cleaned substrate. After pre-baking, a uniform adhesive layer is formed on one side of the substrate. Place the adhesive layer side of the substrate under the pre-made circular hole mask for UV exposure. , the substrate is spaced but parallel to the circular hole mask, and the ultraviolet light is irradiated vertically on the circular hole mask. The circular hole mask includes a light-transmitting area...
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