Conical array broadband absorber and preparation method therefor
An absorber and cone technology, which is applied to the field of tapered array broadband absorbers and their preparation, can solve the problems of inability to prepare small-sized broadband absorbers in a large area, and achieve the effect of a simple preparation method.
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[0034] see figure 1 , figure 1 The flow chart of a preferred embodiment of the preparation method of a tapered array broadband absorber provided by the present invention, as shown in the figure, includes steps:
[0035] S100. Provide a reflective substrate and spin-coat a layer of embossing glue on the reflective substrate, and extrude a nanowire grating structure on the embossing glue by means of nanoimprinting;
[0036] S200. Deposit a titanium film layer on the top of the nanowire grating structure by shadow evaporation, and remove the remaining embossing glue on the reflective substrate by etching;
[0037] S300. Alternately deposit a metal film and a dielectric film on the reflective substrate containing the nanowire grating structure by physical vapor deposition, and the lateral growth of the metal film and the dielectric film on the top of the nanowire grating structure during the deposition process makes the final The width of the structure reaching the bottom of the...
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