Nickel-rhenium alloy target material and preparation method thereof

A technology of rhenium alloy and target material, which is applied in the field of nickel-rhenium alloy target material and its production method, can solve the problems of large particle size variation, insufficient crystallinity, and coarse grain, so as to improve crystallinity and solve the problem of grain size. Large variation in particle size, solving the effect of coarse grains

Active Publication Date: 2019-03-05
SOLAR APPLIED MATERIALS TECHNOLOGY CORPORATION
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  • Abstract
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  • Application Information

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Problems solved by technology

However, most of the seed layers of the prior art have coarse grains (that is, the average grain size is 100 microns to 150 microns), large variation in grain size (that is, the uniformity of the average grain size) about 25% to 40%) and insufficient crystallinity (i.e., the proportion of the intensity of the (111) crystal direction in the FCC structure is less than 60%), which causes the magnetic recording layer deposited on the seed layer to be affected, and there are also Coarse crystal grains, large particle size variation and poor crystallinity defects, even reduce the recording density of magnetic recording media

Method used

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  • Nickel-rhenium alloy target material and preparation method thereof
  • Nickel-rhenium alloy target material and preparation method thereof
  • Nickel-rhenium alloy target material and preparation method thereof

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Embodiment 1 to 19

[0035] Examples 1 to 19: Nickel-rhenium alloy target

[0036] According to the composition of the nickel-rhenium alloy target shown in Table 1 below, weigh and mix appropriate amounts of nickel (Ni), rhenium (Re), iron (Fe), the first metal component (M1) and the second metal component (M2 ) and other raw materials, using vacuum induction melting method, in 5×10 -2 The vacuum environment of Thor, the reaction condition of 100°C higher than the pouring temperature, after holding the temperature, cast at the pouring temperature of 1650°C to 1670°C to obtain a pre-alloyed ingot. Here, the first metal component can be aluminum (Al), zirconium (Zr) or a combination thereof, and the second metal component includes titanium (Ti), osmium (Os), iridium (Ir), yttrium (Y), tantalum (Ta ), niobium (Nb), molybdenum (Mo), or combinations thereof.

[0037] After that, using atomization granulation equipment, at 1×10 -2 Torr to 1×10 -5 The pre-alloyed ingot is atomized into a pre-alloyed ...

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Abstract

The invention provides a nickel-rhenium alloy target material and a preparation method thereof. The nickel-rhenium alloy target material comprises nickel, rhenium and a first metal component, whereinthe first metal component comprises aluminum, zirconium or a combination of aluminum and zirconium. The total number of atoms of the nickel-rhenium alloy target material is taken as a reference, the content of rhenium is greater than 0 atomic percent and less than or equal to 7 atomic percent; the total content of the first metal component is greater than 0 atomic percent and less than or equal to3 atomic percent; and the total content of the rhenium and the first metal component is greater than 0 atomic percent and less than 10 atomic percent. By controlling the composition of the nickel-rhenium alloy target material, the nickel-rhenium alloy target material can be applied to sputtering to form a seed layer of a vertical magnetic recording medium, so that the recording density is improved.

Description

technical field [0001] The present invention relates to a target material of a magnetic recording medium and a manufacturing method thereof, in particular to a nickel-rhenium alloy target material suitable for a seed layer of a perpendicular magnetic recording medium and a manufacturing method thereof. Background technique [0002] As people's demand for the information storage capacity of magnetic recording media is getting higher and higher, how to improve the recording quality of magnetic recording media has always been a research topic actively developed by the industry. According to the magnetization direction of the magnetic head, the magnetic recording media in the prior art can be divided into horizontal magnetic recording media and vertical magnetic recording media. Among them, the recording density of the horizontal magnetic recording medium has been developed to the limit; therefore, the existing technology turns to the research of the vertical magnetic recording ...

Claims

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Application Information

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IPC IPC(8): C23C14/34C22C19/03
CPCC22C19/03C23C14/3407C23C14/3414
Inventor 唐志文刘宜陇黄威智罗尚贤郑惠文
Owner SOLAR APPLIED MATERIALS TECHNOLOGY CORPORATION
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