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Wafer box detection method and wafer box detection system

A detection method and detection system technology, applied in semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve problems such as omissions

Active Publication Date: 2021-03-02
GLOBALWAFERS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The main purpose of the present invention is to provide a method for detecting wafer cassettes and a detection system for wafer cassettes, which are used to improve the prior art in judging whether the predetermined position of the wafer cassette is provided with auxiliary components manually , prone to omissions

Method used

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  • Wafer box detection method and wafer box detection system
  • Wafer box detection method and wafer box detection system
  • Wafer box detection method and wafer box detection system

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Embodiment Construction

[0030] Please also refer to figure 1 and figure 2 , which is a schematic diagram of the detection system of the wafer cassette of the present invention. like figure 1 As shown, the wafer cassette inspection system 1 includes a carrier 10 , a support structure 20 , three sets of inspection modules 30 , three auxiliary inspection modules 40 and a processing module 50 . The carrier 10 is used for carrying a wafer box B. As shown in FIG. The supporting structure 20 is disposed adjacent to the carrier 10 , and the supporting structure 20 may be disposed adjacent to each side of the wafer cassette B not in contact with the carrier 10 according to requirements. The number of detection modules 30 and auxiliary detection modules 40 is not limited to the above, and can be changed according to requirements.

[0031] In practical applications, the support structure 20 may include a top structure 201 and two column structures 202, and the top structure 201 may include a first horizont...

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Abstract

A detection method of a wafer shipping box and a detection system of a wafer shipping box are provided and the method comprises two steps: a detection step and a judging step. The detection step comprises: controlling a plurality of detectors to detect a predetermined position, and using a processing module to convert detection results of the detectors to a plurality of detection values, wherein two of adjacent detectors have an overlapping detection region. The judging step comprises: determining whether an assists component is displayed on a predetermined position. When judging that more than half of the detection results are inside a first predetermined range, the processing module determines the assists component is displayed on the predetermined position. When juding that more than half of the detection results are inside a second predetermined range, the processing module determines the assists component is not displayed on the predetermined position.

Description

technical field [0001] The invention relates to a detection method and a detection system, in particular to a detection method of a wafer box and a detection system of the wafer box for detecting whether auxiliary components are arranged outside the wafer box. Background technique [0002] During the fabrication process, wafers need to be moved between different fabrication stations. Therefore, wafers are usually placed in a wafer cassette for transporting the wafers to specific fabrication stations. In order to facilitate the transportation of the wafer box, or to facilitate the operation of the wafer box by related personnel, the relevant manufacturers will provide detachable auxiliary components (such as handle structures or related snapping structures, etc.) on the outside of the wafer box. This is convenient for the associated robotic arm or personnel at a particular crafting station. Therefore, in various situations of wafer cassette transportation, it has become an i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/66
Inventor 蔡政焜施英汝
Owner GLOBALWAFERS CO LTD