A columnar built-in cryopump
A built-in, cryogenic pump technology, applied in the direction of variable capacity pump components, pumps, pump components, etc., can solve problems such as poor applicability, achieve simple structure, improve the ability to block heat radiation, and high pumping capacity. Effect
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Embodiment 1
[0031] The invention provides a columnar built-in low temperature pump, which is used for evacuating the vacuum chamber of a tokamak device and as an important step in the internal circulation of fuel. Such as Figure 1-5 As shown, the structure of the present invention includes a joint plate, a pump casing 10, an annular 80K outer baffle 11, a liquid helium pipeline 15, several 4.6K cryogenic baffles 13 and an 80K inner baffle 12.
[0032] The joint plate is arranged on the pump casing 10, on which there is an air inlet 7, a liquid helium inlet 1, and a liquid helium outlet 9, which are used to pass gas to be treated and liquid helium into the pump casing. The annular 80K outer baffle 11 is arranged inside the pump casing 10 for shielding heat radiation from the outside of the pump casing, and an insulating layer can be provided outside the pump casing 10 as required. And the ring-shaped 80K outer baffle 11 is provided with a bracket, and all the 80K inner baffles are evenly...
Embodiment 2
[0038] The difference from Example 1 is that this example uses a sandwich-type herringbone baffle to replace the liquid nitrogen cooling pipe. One end of the sandwich-type herringbone baffle is connected to the liquid nitrogen inlet, and the other end is connected to the liquid nitrogen outlet. It is used for liquid nitrogen Flow in the interlayer to cool the annular 80K outer baffle.
[0039] The actual test process data of the present invention are provided below according to the designs of the above-mentioned embodiments 1 and 2.
[0040] Use a flowmeter to adjust the flow rate, when the pump body enters 5.0×10 -3 Pa~5.0×10 -1 In the range of Pa, record the vacuum degree and instantaneous flow rate. The pumping speed formula is S=Q / P, take the value multiple times, give the pumping speed curve, and take the maximum pumping speed value.
[0041] The instantaneous flow rate of nitrogen gas is 100SCCM, and the instantaneous flow rate can be increased according to the actual...
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