Vertical cavity surface emitting laser array and manufacturing method and application thereof

A vertical cavity surface emission and laser array technology, applied in the laser field, can solve the problems of uneven current density distribution, poor consistency of light intensity distribution, low conversion power, etc., to improve the effective light emitting area, high voltage and low current working mode, The effect of high energy density

Active Publication Date: 2020-06-19
VERTILITE CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the vertical cavity surface emitting laser (VCSEL) with an oxide aperture faces the problem of uneven current density distribution, resulting in low conversion power and poor consistency of light intensity distribution.

Method used

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  • Vertical cavity surface emitting laser array and manufacturing method and application thereof
  • Vertical cavity surface emitting laser array and manufacturing method and application thereof
  • Vertical cavity surface emitting laser array and manufacturing method and application thereof

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Embodiment Construction

[0044] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0045] It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arbitrarily during actual impleme...

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Abstract

The invention provides a vertical cavity surface emitting laser array and a manufacturing method and application thereof. The vertical cavity surface emitting laser array comprises at least two emitters, wherein each emitter comprises at least two emitting units, and a first conductive connection layer is arranged between the emitting units; and at least two insulating regions which are arranged between at least two emitters, wherein at least two emitters are connected in series. The vertical cavity surface emitting laser array can improve the light emitting area.

Description

technical field [0001] The invention relates to the technical field of lasers, in particular to a vertical cavity surface emitting laser array and a manufacturing method and application thereof. Background technique [0002] Vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser, VCSEL) is developed on the basis of gallium arsenide semiconductor materials. The advantages of circular output spot, single longitudinal mode output, small threshold current, low price, and easy integration into large-area arrays are widely used in optical communication, optical interconnection, optical storage and other fields. [0003] The Vertical Cavity Surface Emitting Laser (VCSEL) is a new type of laser that emits light from the vertical surface. Its structure is different from the traditional edge emitting laser. It has many advantages: the length of the optical cavity is extremely short, which leads to the wide The single longitudinal mode operation can be realized...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/183H01S5/18
CPCH01S5/18H01S5/183H01S5/18308
Inventor 丁维遵刘嵩
Owner VERTILITE CO LTD
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