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Reconstruction method of high-order free-form surface wavefront with any aperture shape

An aperture and free technology, applied in the field of optical measurement, can solve the problems of complex high-order polynomials, increase calculation difficulty and time, and achieve the effect of improving the accuracy of wavefront reconstruction

Inactive Publication Date: 2020-08-04
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

However, when the local free-form surface has a large gradient, hundreds or even thousands of high-order polynomials are required to achieve nanoscale reconstruction accuracy, and the expressions of high-order polynomials are very complicated, which greatly increases the difficulty and time of calculation.

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  • Reconstruction method of high-order free-form surface wavefront with any aperture shape
  • Reconstruction method of high-order free-form surface wavefront with any aperture shape
  • Reconstruction method of high-order free-form surface wavefront with any aperture shape

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Embodiment Construction

[0021] The present invention will be described in detail below in conjunction with the implementation flow chart, but the protection scope of the present invention should not be limited thereby.

[0022] Such as figure 1 As shown, a reconstruction method of a high-order free-form surface wavefront of an arbitrary aperture shape in the present invention comprises the following steps:

[0023] 1) Obtain the wavefront slope and corresponding position information of the free-form surface through the fringe reflection method or the Hartmann sensor detection technology. For the discrete gradient data points on any aperture, use the Zernike polynomial as the base to construct the gradient through the numerical orthogonal change method Orthogonal polynomial, F=ZB T , where F represents the numerical orthogonal polynomial, Z represents the Zernike polynomial, the linear combination coefficient matrix B is obtained by the Cholesky decomposition method, the matrix F is derived to obtain...

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Abstract

The invention discloses a reconstruction method of high-order free-form surface wavefront with any aperture shape. According to the method, a mode method based on a numeralization orthogonal polynomial and a finite difference method based on the polynomial are combined, and complex free-form surface wavefront reconstruction of any aperture shape can be achieved. Firstly, for the different apertureshapes, the numeralized orthogonal polynomial is constructed for fitting wavefront slope information, and a polynomial coefficient and first wavefront are obtained; then the polynomial coefficient and a numeralized gradient polynomial are linearly combined to obtain a slope of the wavefront reconstructed for the first time, and a slope residual error is calculated; and then the slope residual error which cannot be fitted by the polynomial is fitted by using a polynomial-based region method to obtain second wavefront, and finally the reconstructed wavefront is a sum of two wavefronts. Comparedwith an existing wavefront reconstruction method, the method has the main advantages that the method is suitable for rapid reconstruction of the complex free-form surface wavefront with any aperture,wavefront mode information can be obtained, and the wavefront reconstruction precision of the finite term numeralization orthogonal polynomial can be improved.

Description

technical field [0001] The invention belongs to the field of optical measurement technology, in particular to a hybrid reconstruction method for wavefront reconstruction based on wavefront slope information for arbitrary aperture shapes, which is suitable for wavefront gradient information detection technologies such as Hartmann wavefront sensors and fringe reflection methods . Background technique [0002] Optical freeform surfaces have been widely used in medical imaging, aerospace, military and other fields because of their large degrees of freedom and asphericity, which can improve the optical performance of the system and simplify the system structure. Hartmann sensor and fringe reflection method are two typical detection techniques for measuring the wavefront slope information of free-form surfaces. Therefore, wavefront reconstruction methods are needed to recover the detected slope information into wavefronts. Wavefront reconstruction methods can generally be divided...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J9/00G06F17/18
CPCG01J9/00G06F17/18G01J2009/002
Inventor 吴珍魏朝阳胡晨万嵩林
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI