Double-chamber quartz pipe structure
A quartz tube and double-chamber technology, which is applied in the field of double-chamber quartz tube structure, can solve problems such as adhesion between the furnace door and the nozzle seal, poor wafer entry and exit, and affecting the sealing effect, achieving clean furnace mouth and simple structure , easy-to-achieve effects
Pending Publication Date: 2020-08-07
赛瑞达智能电子装备(无锡)有限公司
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Problems solved by technology
[0003] The process tubes routinely used in the industry are single-diameter process tubes in the form of quartz process tubes. During the process, the gas reactants will be sealed due to the simple sealing method of the tube mouth and the high temperature here. Good, because the oxygen in the leaking air reacts at the mouth of the nozzle, and the reactant remains, which causes the furnace door and the nozzle seal to stick due to the reactant, which further affects the sealing effect, and a large amount of reactant accumulates at the lower part of the furnace mouth. Unsmooth entry and exit of wafers can also cause contamination of the subsequent wafer process due to the presence of many reactants at the furnace mouth
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[0015] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0016] see Figure 1-2 , an embodiment provided by the present invention: a double-chamber quartz tube structure, including a quartz process tube 1, a furnace door quartz chamber 2, an annular flange 3, a process gas inlet pipe 4, a tail pipe 5, a furnace door The chamber inlet pipe 6 and the inner and outer double-sealed furnace door 7, the left end of the quartz process tube 1 is provided with a furnace door quartz chamber 2, and the furnace door quartz cham...
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The invention discloses a double-chamber quartz pipe structure. The double-chamber quartz pipe structure comprises a quartz process pipe, a furnace door quartz chamber, an annular flange, a process gas inlet pipe, a tailpipe, a furnace door chamber gas inlet pipe and an inner and outer double sealed furnace door, the furnace door quartz chamber is formed in the left end of the quartz process pipe,the annular flange is arranged at the left end of the quartz process pipe, the process gas inlet pipe is fixedly installed in the quartz process pipe, the tailpipe is fixedly installed at the right end of the quartz process pipe, the furnace door chamber gas inlet pipe is fixedly installed at the top of the furnace door quartz chamber, and the inner and outer double sealed furnace door is arranged on the left side of the furnace door quartz chamber. According to the double-chamber quartz pipe structure, the structure of a commonly used process pipe is improved, thus the quartz pipe ensures that gas reactants in the process are not left at a pipe orifice, the furnace mouth is clean, it is easy to keep good sealing state with the inner and outer double sealed furnace door, the structure issimple, and broad development space and high popularization value are achieved.
Description
technical field [0001] The invention relates to the technical field of low-pressure diffusion process for wafers in the semiconductor and photovoltaic industries, and specifically relates to a double-chamber quartz tube structure. Background technique [0002] A semiconductor refers to a material whose conductivity at room temperature is between that of a conductor and an insulator. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting applications, high-power power conversion and other fields. For example, a diode is a device made of a semiconductor. No matter from the perspective of technology or economic development, the importance of semiconductors is enormous. The core units of most of today's electronic products, such as computers, mobile phones or digital recorders, are closely related to semiconductors. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., a...
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IPC IPC(8): F27B17/00F27D1/18
CPCF27B17/0025F27B17/0083F27D1/1858
Inventor张海林滕玉朋
Owner赛瑞达智能电子装备(无锡)有限公司