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Preparation method of titanium oxide superconducting thin film

A technology of titanium oxide and superconducting thin film, which is applied in the field of preparation of titanium oxide superconducting thin film, to achieve the effect of simplifying the growth process and increasing the superconducting transition temperature

Active Publication Date: 2021-05-21
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Afterwards, although the superconducting transition temperature of the bulk material was increased after heat treatment, there was no turning point change.

Method used

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  • Preparation method of titanium oxide superconducting thin film
  • Preparation method of titanium oxide superconducting thin film
  • Preparation method of titanium oxide superconducting thin film

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Embodiment 1

[0045] This embodiment one provides a kind of preparation method of titanium oxide superconducting thin film, such as figure 1 shown, including the following steps:

[0046] S1. A polycrystalline target of titanium oxide is prepared by a solid-state method;

[0047] S2. Prepare the substrate for the titanium oxide superconducting thin film to be produced;

[0048] S3, ablate the target material in the step S1 by using a pulsed laser deposition system, and make the ablated target material epitaxy on the substrate in the step S2 to prepare a titanium oxide superconducting thin film.

[0049] Specifically, the polycrystalline target material of the titanium oxide is partially Ti2 o 3 Has been transformed into Ti 3 o 5 polycrystalline target.

[0050] Specifically, the substrate is a hexagonal oxide substrate, and the hexagonal oxide substrate is α-Al 2 o 3 , however, the hexagonal oxide substrate includes but is not limited to α-Al 2 o 3 , where α-Al 2 o 3 It is a typi...

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Abstract

The invention relates to the technical field of material synthesis, in particular to a preparation method of a titanium oxide superconducting thin film. The method comprises the steps that S1, a polycrystalline target material of titanium oxide is prepared through a solid phase method; S2, a substrate of the titanium oxide superconducting thin film to be produced is prepared; and S3, the target material in the step S1 is subjected to ablation through a pulse laser deposition system, the target material obtained after ablation extends on the substrate in the step S2, and the titanium oxide superconducting thin film is prepared. According to the method, the titanium oxide superconducting thin film material can be prepared without controlling oxygen partial pressure in the growth process, the growth process of the titanium oxide superconducting thin film material is simplified, and the superconducting transition temperature is increased.

Description

technical field [0001] The invention relates to the technical field of material synthesis, in particular to a method for preparing a titanium oxide superconducting thin film. Background technique [0002] The current research on unconventional superconducting materials mainly focuses on quasi-two-dimensional materials such as copper-based and iron-based materials. The research on these two types of materials is currently focused on basic research with the core of revealing their unconventional superconducting mechanism. The superconducting application mainly focuses on the traditional niobium-based (including niobium element, alloy, compound, etc.) superconducting materials, which have the characteristics of stable properties and easy processing, but the cost is relatively high. Therefore, the research on new superconducting materials is of great significance in the physical frontier and practical application of superconducting materials. Among them, titanium oxide has the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/28C23C14/08C23C14/58C30B1/02C30B29/16
CPCC23C14/28C23C14/083C23C14/5806C30B1/02C30B29/16Y02E40/60
Inventor 冯嘉鑫王玲玲李卓君宋叶凯彭炜牟刚谢晓明
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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