The utility model discloses an
evaporation source device for
molecular beam epitaxy, and aims to solve the problems that in the prior art, an
evaporation source is complex in structure, high in
energy consumption and serious in deflation, different cells are prone to influence each other and the like. The
evaporation source comprises the following components: an aluminum
oxide substrate, a glass
crucible, a lamp filament, an
electrode (
aviation plug), a
thermocouple, a water tank, a supporting rod, a
flange and the like. Wherein raw materials to be evaporated are contained in the glass
crucible; the aluminum
oxide substrate supports the shallow
crucible; the filament is used as a high-temperature
metal material and is connected with the
electrode which is connected with the high-
voltage power supply. The supporting rod connects the water tank and the
flange. By adopting the technical scheme of the invention, the to-be-evaporated raw materials can be uniformly heated, so that stable material evaporation is provided, meanwhile, the
mutual influence between different cells is small, and simultaneous evaporation and co-deposition can be realized; the filament has a heating function, so that the evaporation source is simple in structure,
energy consumption is reduced, and industrial production is facilitated; the evaporation source equipment is small in size and small in air release amount; in addition, a
thermocouple temperature measuring device is arranged, and suggestion and accurate regulation and control of the temperature of the glass crucible can be achieved.