The invention relates to a GaN
Schottky diode. The GaN
Schottky diode comprises a substrate, an N+ GaN layer, an N-GaN layer table surface and a P-type GaN layer, wherein grooves are etched in the P-type GaN layer, Schottky
metal layers are formed on the P-type GaN layer and are used as positive electrodes, and ohmic
metal layers are formed on the N+ GaN layer and are used as negative electrodes. A fabrication method of the GaN
Schottky diode comprises the steps of sequentially growing the N+ GaN layer, the N-GaN layer and the P-type GaN layer on an upper surface of the substrate; forming the table surface with the P-type GaN layer and the N-GaN layer, and partially
etching the P-type GaN layer on each table surface to form a series of grooves; and depositing the Schottky
metal layers on the P-type GaN layer to used as the positive electrodes, and depositing the ohmic metal layers on the N+GaN layer to be used as the negative electrodes. By the GaN Schottky
diode, carriers under a Schottky
electrode can be consumed, the
Schottky barrier height is increased, the leakage current is reduced, the
breakdown voltage is increased, the grooves under the Schottky
electrode can be used for reducing the positive conduction
voltage, so that the positive characteristic and the negative characteristic of the device are simultaneously improved.