The utility model relates to the technical field of power semiconductors, in particular to an IGBT (
Insulated Gate Bipolar Transistor) device with a built-in
ballast resistor, which comprises a trench region, N + type source regions,
polycrystalline silicon regions and
contact hole regions, a plurality of N + type source regions and
polycrystalline silicon regions are alternately arranged at intervals along the length direction of the trench region, and the
contact hole regions are positioned in the N + type source regions; along the thickness direction of the IGBT device, the IGBT device sequentially comprises a collector
metal layer, a P + substrate and an N-substrate, and a deep groove is etched on the N-substrate corresponding to a groove region; first doped regions and second doped regions which are alternately distributed are formed on the N-substrate on the two opposite sides of the deep groove, the positions of the first doped regions correspond to the positions of the N + type source regions, and the positions of the second doped regions correspond to the positions of the
polycrystalline silicon regions; the top end of the first doped region is provided with an N + well region, and the top end of the second doped region is provided with a second N-well region. The IGBT device provided by the utility model can obtain a larger
positive temperature coefficient, and has little influence on the conduction
voltage drop VCESAT of the IGBT device at normal temperature.