The invention discloses a
metal-
oxide -
semiconductor field effect transistor (
MOSFET) capable of effectively reducing source drain
contact resistance and a manufacturing method of the
MOSFET. The
MOSFET capable of effectively reducing the source drain
contact resistance and the manufacturing method of the MOSFET comprises substrates, a grid stacking structure at the bottom of the substrate, source-drain zones, grate side walls and
metal silicide, wherein the source-drain zones are arranged in the substrates of the two sides of the grid stacking structure, the
grating side walls are arranged on the substrates of the two sides of the grid stacking structure, and the
metal silicide is placed in the source-drain zones of the two sides of the
grating side walls. The MOSFET capable of effectively reducing the source drain
contact resistance and the manufacturing method of the MOSFET is characterized in that a fractional condensation zone of
doping cation is arranged on an interface of the
metal silicide the source-drain zones. According to the MOSFET capable of effectively reducing the source drain contact resistance and the manufacturing method of the MOSFET, due to the fact that the fractional condensation zone of
doping cation is arranged on the interface of source-drain contact of the
metal silicide and the source-drain zones, schottky
potential barrier height can be effectively reduced, the source-drain contact resistance is greatly reduced, and property of components is further improved.