A kind of out-of-plane highly oriented cufesb film preparation method
A thin film preparation and orientation technology, which is applied in vacuum evaporation coating, coating, sputtering coating, etc., can solve the problems of not achieving obvious control effect and single control means
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[0047] The embodiment of the present invention provides a method for preparing an out-of-plane highly oriented CuFeSb film, such as figure 1 As shown, the method includes the following steps:
[0048] S1. Prepare CuFeSb polycrystalline target;
[0049] S2. Provide a cubic or tetragonal single crystal substrate;
[0050] S3. Cleaning the single crystal substrate;
[0051] S4. Annealing the cleaned single crystal substrate;
[0052] S5. Ablating the CuFeSb polycrystalline target, and growing a CuFeSb thin film on the surface of the single crystal substrate.
[0053] In the embodiment of the present invention, the basic principle and process of using the pulsed laser deposition method to prepare thin films is that the focused laser beam interacts with the target to generate plasma, and the plasma is transported in space to form a highly oriented plume, which carries The high-energy particles condense on the substrate to form a thin film. Therefore, the acquisition of the tar...
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