Preparation method of CuFeSb thin film
A thin-film preparation and thin-film technology, which is applied in the field of CuFeSb thin-film preparation, can solve the problems of single control means and no obvious control effect.
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[0047] The embodiment of the present invention provides a kind of CuFeSb film preparation method, such as figure 1 As shown, the method includes the following steps:
[0048] S1. Prepare CuFeSb polycrystalline target;
[0049] S2. Provide a cubic or tetragonal single crystal substrate;
[0050] S3. Cleaning the single crystal substrate;
[0051] S4. Annealing the cleaned single crystal substrate;
[0052] S5. Ablating the CuFeSb polycrystalline target, and growing a CuFeSb thin film on the surface of the single crystal substrate.
[0053] In the embodiment of the present invention, the basic principle and process of using the pulsed laser deposition method to prepare thin films is that the focused laser beam interacts with the target to generate plasma, and the plasma is transported in space to form a highly oriented plume, which carries The high-energy particles condense on the substrate to form a thin film. Therefore, the acquisition of the target is the first step in t...
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