Laser and manufacturing method and application thereof

Abstract

The invention provides a laser and a manufacturing method and application thereof. The laser comprises a lifting substrate, a reflecting layer, at least one platform-shaped structure, a plurality of grooves and a second material layer, wherein the lifting substrate comprises a first surface and a second surface which are opposite to each other; the reflecting layer is positioned on the second surface; the at least one platform-shaped structure is positioned on the reflecting layer, and the platform-shaped structure comprises at least two active layers and a first material layer; the pluralityof grooves are formed in the first material layer; the second material layer is located on the first material layer and fills the plurality of grooves; the refractive index of the first material layeris greater than that of the second material layer; a tunnel junction is arranged between the at least two active layers, and each active layer comprises a first semiconductor layer, an active regionand a second semiconductor layer. The laser provided by the invention can improve the current injection efficiency.

Description

technical field [0001] The invention relates to the technical field of lasers, in particular to a laser and its manufacturing method and application. Background technique [0002] Vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser, VCSEL) is developed on the basis of gallium arsenide semiconductor material, which is different from other light sources such as LED (light emitting diode) and LD (Laser Diode, laser diode), with small size, The advantages of circular output spot, single longitudinal mode output, small threshold current, low price, and easy integration into large-area arrays are widely used in optical communication, optical interconnection, optical storage and other fields. [0003] Vertical-cavity surface-emitting lasers can be used in electronic fields such as three-dimensional perception and lidar, but when the power of the vertical-cavity surface-emitting laser is small, it cannot satisfy the scanning of long-distance objects. At t...

AI Technical Summary

Problems solved by technology

[0003] Vertical-cavity surface-emitting lasers can be used in electronic fields such as three-dimensional perception and lidar, but when the power of the vertical-cavity surface-emitting laser is small, it cannot meet the scanning of long-distance objects

At the same time, because the vertical cavity surface emitting laser emits a small spot, it cannot scan a larger area

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