High-frequency-response passive LC rotating speed sensor and testing method thereof
A technology of rotational speed sensor and testing method, applied in the direction of linear/angular velocity measurement, velocity/acceleration/shock measurement, instrument, etc., which can solve the problems of limiting the applicable temperature of the sensor, limited application of the sensor, complex mechanical structure, etc., to achieve light weight, Improve the application range and realize the effect of dynamic measurement
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[0027] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
[0028] Such as figure 2 As shown, the embodiment of the present invention provides a high-response passive LC speed sensor, including:
[0029] The speed sensitive unit on the high-temperature and high-rotation parts is equivalent to a series LC circuit, which is used to sense the speed parameter to be measured; the speed sensitive unit contains 4 layers of films, which are insulating layer, conductive layer (two layers of film) and dielectric layer , prepared by the magnetron sputtering process...
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