Detection system and detection method of vertical crystal boat position
A detection system and vertical technology, which is applied in the field of detection systems for the position of vertical crystal boats, can solve problems such as position deviation, scraping of support rods, product defects, etc., and achieve the effect of rapid inspection
Active Publication Date: 2022-07-19
HUA HONG SEMICON WUXI LTD
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Problems solved by technology
During the reciprocating up and down movement of the vertical wafer boat, position deviation will occur. When the position of the wafer boat is offset too much, the edge of the wafer in the vertical wafer boat will easily scratch the support rod, resulting in product defects.
[0004] At present, the monitoring of the position of the vertical crystal boat adopts the method of manually opening the door to check the corrected position. After checking the corrected position, it is necessary to run testrun to witness the internal environmental particles of the crystal boat, which seriously affects the running time of the vertical furnace tube machine.
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[0036] The technical solutions in the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.
[0037] In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the indicated device or element must have a ...
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The application discloses a detection system for the position of a vertical wafer boat, which relates to the field of semiconductor manufacturing. The method for detecting the position of the vertical crystal boat includes adjusting the detection system of the vertical crystal boat position, so that the detection system of the vertical crystal boat position matches the predetermined crystal boat position on the transmission device; turning on the laser transmitter, the laser transmitter emits laser light ; Detect whether the photoelectric sensor sends an electrical signal through the signal processor; if it is detected that the photoelectric sensor sends an electrical signal, it is determined that the position of the vertical crystal boat has not shifted; if no electrical signal is sent from the photoelectric sensor, it is determined that the vertical crystal boat The position is shifted; the detection system for the position of the vertical crystal boat includes at least three baffles, reflectors, laser transmitters, photoelectric sensors, and signal processors arranged on the top of the vertical crystal boat; it solves the problem of monitoring the current vertical crystal boat. It takes a long time to locate the position; it can quickly check the position of the vertical crystal boat without affecting the internal environment of the machine.
Description
technical field [0001] The present application relates to the field of semiconductor manufacturing, and in particular, to a detection system and a detection method for the position of a vertical wafer boat. Background technique [0002] Vertical furnace tube machine is one of the important equipment in the front process of semiconductor production line. It is used for diffusion, oxidation, annealing and alloying of products such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. [0003] When using the vertical furnace tube machine to process the wafers, it is necessary to use the vertical wafer boat to carry the wafers. The vertical wafer boat includes support rods and support feet, the support feet are evenly arranged on the inner side of the support rod, and multiple wafers are horizontally arranged in the wafer boat through the support feet. During the reciprocating up and down movement of the vertical waf...
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IPC IPC(8): H01L21/67G01S17/06
CPCH01L21/67259G01S17/06
Inventor 杨德明张召
Owner HUA HONG SEMICON WUXI LTD