System and method for detecting position of vertical wafer boat
A detection system, a vertical technology, is applied in the field of detection systems for the position of vertical crystal boats, which can solve problems such as position deviation, product defects, scraping of support rods, etc., and achieve the effect of rapid inspection
Active Publication Date: 2021-02-05
HUA HONG SEMICON WUXI LTD
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Problems solved by technology
During the reciprocating up and down movement of the vertical wafer boat, position deviation will occur. When the position of the wafer boat is offset too much, the edge of the wafer in the vertical wafer boat will easily scratch the support rod, resulting in product defects.
[0004] At present, the monitoring of the position of the vertical crystal boat adopts the method of manually opening the door to check the corrected position. After checking the corrected position, it is necessary to run testrun to witness the internal environmental particles of the crystal boat, which seriously affects the running time of the vertical furnace tube machine.
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[0036] The technical solutions in this application will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.
[0037] In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, use a specific orientati...
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The invention discloses a system for detecting the position of a vertical wafer boat, and relates to the field of semiconductor manufacturing. A method for detecting the position of the vertical waferboat comprises the following steps: debugging a detection system of the position of the vertical wafer boat, and matching the detection system of the position of the vertical wafer boat with a predetermined wafer boat position on a transmission device; starting a laser emitter, and emitting laser by the laser emitter; detecting whether the photoelectric sensor sends an electric signal through thesignal processor; if it is detected that the photoelectric sensor sends an electric signal, determining that the position of the vertical wafer boat does not deviate; and if it is not detected that the photoelectric sensor sends the electric signal, determining that the position of the vertical wafer boat deviates. The system for detecting the position of the vertical wafer boat comprises at least three baffle plates arranged at the top of the vertical wafer boat, a reflecting plate, the laser emitter, the photoelectric sensor and a signal processor. The problem of long time consumption for monitoring the position of the vertical wafer boat at present is solved; and the effects of rapidly checking the position of the vertical wafer boat and not influencing the internal environment of themachine table are achieved.
Description
technical field [0001] The present application relates to the field of semiconductor manufacturing, in particular to a detection system and detection method for the position of a vertical crystal boat. Background technique [0002] The vertical furnace tube machine is one of the important equipment in the front-end process of the semiconductor production line. It is used for the diffusion, oxidation, annealing and alloying of products such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers. [0003] When using the vertical furnace tube machine to process wafers, it is necessary to use the vertical wafer boat to carry the wafer, and the vertical wafer boat moves vertically under the drive of the transmission device, and enters and exits the reaction chamber of the vertical furnace tube machine. The vertical wafer boat includes support rods and support feet, the support feet are evenly arranged inside the support ...
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IPC IPC(8): H01L21/67G01S17/06
CPCH01L21/67259G01S17/06
Inventor 杨德明张召
Owner HUA HONG SEMICON WUXI LTD