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Micro-acoustic device with reflective phononic crystal and method of manufacture

A technology of acoustic equipment and phononic crystals, applied in the direction of electrical components, impedance networks, etc., can solve the problems of complex acoustic confinement structures and expensive manufacturing methods

Pending Publication Date: 2021-08-31
RF360新加坡私人有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Acoustically confining structures are known to create different problems or require complex and expensive manufacturing methods

Method used

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  • Micro-acoustic device with reflective phononic crystal and method of manufacture
  • Micro-acoustic device with reflective phononic crystal and method of manufacture
  • Micro-acoustic device with reflective phononic crystal and method of manufacture

Examples

Experimental program
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Embodiment Construction

[0042] refer to figure 1 A to figure 1 D explains the first fabrication method of a phononic crystal material for forming a confinement structure at a micro-acoustic device. Each figure shows the stages of the process.

[0043]The process starts with a substrate SU, which can be a conventional carrier of a mechanically stable material with desired thermomechanical properties. On this support a layer of functional material can be deposited. Alternatively, the substrate may consist entirely of a functional material such as, for example, a piezoelectric wafer. Further, the substrate may have a functional device structure of a micro-acoustic device, for example, an electrode structure of a SAW device or a BAW device.

[0044] The first material layer M1 is deposited on the substrate SU by a suitable deposition process, such as figure 1 As shown in A. The first material may be a metal, a ceramic layer or a resin such as a polymer, or any other layer forming material compatibl...

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PUM

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Abstract

A micro-acoustic device comprises a confinement structure (CS) adapted to block propagation of acoustic waves of an acoustic wave resonator (TEL, PL, BEL; ES) at an operation frequency of the device to confine the acoustic waves to the acoustic path or the acoustic volume. It is proposed to use a phononic crystal material for producing the confinement structure.

Description

technical field [0001] The present invention relates to microacoustic devices such as SAW devices and BAW devices and methods of manufacture. In particular, the invention provides a better confinement of the acoustic waves within these devices, thereby increasing the overall quality factor Q of the devices. Background technique [0002] So far, lateral energy confinement has been accomplished through geometry-based design. Within a BAW device presented as an SMR device (Sturdy Mounted Resonator), the acoustic isolation from the underlying substrate is accomplished by a Bragg mirror that reflects the acoustic waves by interference at the λ quarter layer, where λ is the wavelength of the sound wave. In BAW devices, presented as FBAR devices, acoustic isolation from the underlying substrate is provided by an air-filled gap between the active resonator volume disposed on the membrane and the substrate. [0003] SAW resonators or transmit filters use a grid of reflective strip...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02H03H9/17H03H3/02H03H3/08
CPCH03H3/02H03H3/08H03H9/02118H03H9/02228H03H9/02574H03H9/02645H03H9/02653H03H9/02866H03H9/02905H03H9/172H03H9/54
Inventor W·艾格纳E·施米德哈默M·希克
Owner RF360新加坡私人有限公司