Method for testing secondary electron yield of insulating medium material and application
A technology of secondary electrons and insulating media, applied in the direction of analyzing materials, using wave/particle radiation for material analysis, measuring devices, etc. Amount and other issues
Active Publication Date: 2021-10-22
INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS
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Problems solved by technology
[0006]
The purpose of the present invention is to provide a method for testing the secondary electron yield of insulating dielectric materials, which solves the problem that the existing testing methods cannot effectively neutralize the positive charges accumulated on the surface of the sample, resulting in the inability to accurately measure the secondary electron yield of insulating dielectric materials
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Embodiment 1
[0057] In this embodiment, an alumina ceramic sample is used as a test object for illustration.
[0058] In this embodiment, the double-layer grid tennis-shaped secondary electron collector is used for the test. When the double-layer grid tennis-shaped secondary electron collector is used to measure the secondary electron yield of the insulating dielectric material sample, the positional relationship between the collector, the electron gun and the sample stage is as follows: figure 1 As shown, the double-layer grid ball-shaped secondary electron collector is an existing device disclosed in the patent (201810966450.4 in CN). The double-layer grid ball-shaped secondary electron collector is composed of two layers of grids and two layers of electrodes. There is an electron gun conduit insertion hole, and a sample stage insertion hole is opened at the bottom; the insertion conduit at the front of the electron gun is inserted into the double-layer grid spherical secondary electron c...
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The invention discloses a method for testing the secondary electron yield of an insulating medium material and application. The testing method comprises the following steps: S1, bombarding the surface of a sample by adopting a pulsed electron beam to inspect the influence of positive charge accumulation on the surface of the sample on a secondary electron emission process, and determining the times of charge neutralization operation; and S2, determining the secondary electron yield of the sample based on the number of charge neutralization operations. The testing method is based on a double-layer grid ball-shaped secondary electron collector; according to the secondary electron yield testing method, positive charges accumulated on the surface of the insulating medium material after secondary electron emission can be effectively compensated, and the situation that the accumulated charges affect secondary electron emission and cause testing errors is prevented; the charge compensation effect is not influenced by factors such as the secondary electron yield of the material and the thickness of a sample, and the accuracy of the test method is not limited by the application range; the true secondary electron yield, the back scattering electron yield and the total secondary electron yield of the insulating medium material sample can be measured at the same time.
Description
technical field [0001] The invention relates to the technical field of testing secondary electron emission characteristics on the surface of materials, in particular to a method and application for testing secondary electron yield of insulating dielectric materials. Background technique [0002] When incident electrons with a certain energy bombard a solid material, the surface of the material will emit secondary electrons. The ratio of the number of secondary electrons emitted from the surface of the material to the incident electrons is called the secondary electron yield, which changes with the energy of the incident electrons. curve. The secondary electron yield on the surface of insulating dielectric materials is an important material surface characteristic that is generally concerned in many research fields such as vacuum electrical insulation, spacecraft surface charging and discharging, high-power microwave dielectric windows, and photomultiplier devices. The second...
Claims
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IPC IPC(8): G01N23/2251
CPCG01N23/2251
Inventor 何佳龙杨洁张晓宁刘平陈欣赵伟李杰董攀王韬刘飞翔石金水
Owner INST OF FLUID PHYSICS CHINA ACAD OF ENG PHYSICS