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Flexible hinge assembly for micro rotation of workpiece table

A flexible hinge and micro-rotation technology, applied in the field of hinges, can solve problems such as low stability, poor adaptability of integrated hinge structure, fatigue fracture, etc., and achieve the effect of good stability, avoid fatigue fracture, and large steering rigidity

Active Publication Date: 2022-03-18
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the above problems, the object of the present invention is to provide a flexible hinge assembly for the micro-rotation of the workpiece table to solve the problems of poor adaptability of the integrated hinge structure, low stability under repeated working conditions, and easy fatigue fractures

Method used

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  • Flexible hinge assembly for micro rotation of workpiece table
  • Flexible hinge assembly for micro rotation of workpiece table
  • Flexible hinge assembly for micro rotation of workpiece table

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Embodiment Construction

[0033] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0034] The specific embodiment of the flexible hinge assembly used for the micro-rotation of the workpiece table of the present invention, such as Figure 1 to Figure 7 As shown, the flexible hinge assembly used for the micro-rotation of the workpiece table includes a first part, a second part and a flexible hinge body 3, and the first part and the second part are respectively connected to the flexible hinge body 3; the flexible hinge body 3 includes stacked The first hinge unit 31 and the second hinge unit 32, the first hinge unit 31 includes two first arc segments 311, and a first X-shaped connection fixedly connected between the two first arc segments 311 Segment 312, ...

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Abstract

The invention provides a flexible hinge assembly for micro-rotation of a workpiece table, and relates to the field of hinges. The flexible hinge assembly comprises a first component, a second component and a flexible hinge body, the flexible hinge body comprises a first hinge single body and a second hinge single body which are arranged in a stacked mode, the first hinge single body comprises two first arc-shaped sections and a first X-shaped connecting section, and the two first arc-shaped sections are oppositely arranged in a spaced mode to form a first notch; the second hinge single body comprises two second arc-shaped sections and a second X-shaped connecting section, and the two second arc-shaped sections are oppositely arranged at intervals to form a second notch; the first notch and the second notch are communicated in the stacking direction to form a notch space, the first component is connected to the arc-shaped section on one side of the notch space, and the second component is connected to the arc-shaped section on the other side of the notch space. The acute angle of the first X-shaped connecting section faces the first notch, and the obtuse angle of the second X-shaped connecting section faces the second notch. Precise rotation in the Rz direction is achieved, adaptability is high, and stability is good under the repeated working condition.

Description

technical field [0001] The invention relates to the technical field of hinges, in particular to a flexible hinge assembly for micro-rotation of a workpiece table. Background technique [0002] As the core equipment in the semiconductor industry, lithography machines have high requirements for productivity and overlay accuracy. The workpiece table needs to meet multiple free positioning movements under high-speed and high-acceleration conditions to complete alignment, leveling, focusing and exposure. Waiting for work. [0003] For example, the Chinese invention patent application with the application publication number of CN111650816A and the application publication date of 2020.09.11 discloses a flexible connection device, a measurement system and a photolithography machine, and specifically discloses that the flexible connection device includes a connection body and a superposition along the Z direction. The first flexible unit and the second flexible unit arranged in the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16C11/12G03F7/20
CPCF16C11/12G03F7/70725
Inventor 吴剑威王辉赵鹏越晏祯卓张银李一帆马亚蕊
Owner HARBIN INST OF TECH
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