A flexible hinge assembly for micro-rotation of workpiece table

A flexible hinge and micro-rotation technology, applied in the field of hinges, can solve the problems of fatigue fracture, low stability, poor adaptability of integrated hinge structure, etc., and achieve the effect of high steering rigidity, good stability, and avoid fatigue fracture

Active Publication Date: 2022-07-05
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In order to solve the above problems, the object of the present invention is to provide a flexible hinge assembly for the micro-rotation of the workpiece table to solve the problems of poor adaptability of the integrated hinge structure, low stability under repeated working conditions, and easy fatigue fractures

Method used

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  • A flexible hinge assembly for micro-rotation of workpiece table
  • A flexible hinge assembly for micro-rotation of workpiece table
  • A flexible hinge assembly for micro-rotation of workpiece table

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Embodiment Construction

[0033] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments. The following examples are intended to illustrate the present invention, but not to limit the scope of the present invention.

[0034] The specific embodiment of the flexible hinge assembly for the micro-rotation of the workpiece table of the present invention, such as Figure 1 to Figure 7 As shown, the flexible hinge assembly used for the micro-rotation of the workpiece table includes a first part, a second part and a flexible hinge body 3, and the first part and the second part are respectively connected with the flexible hinge body 3; The first hinge unit 31 and the second hinge unit 32, the first hinge unit 31 includes two first arc segments 311, and a first X-shaped connection fixedly connected between the two first arc segments 311 In the segment 312 , the two first arc segments 311 are relatively spaced apart t...

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Abstract

The invention provides a flexible hinge assembly used for micro-rotation of a workpiece table, and relates to the field of hinges. The flexible hinge assembly includes a first part, a second part and a flexible hinge body, the flexible hinge body includes a first hinge unit and a second hinge unit arranged in layers, and the first hinge unit includes two first arc segments and The first X-shaped connecting segment, the two first arc-shaped segments are relatively spaced apart to form a first gap; the second hinge unit includes two second arc-shaped segments and a second X-shaped connecting segment, two second arc-shaped segments The second gap is formed by relatively spaced arrangement; the first gap and the second gap are connected along the stacking direction to form a gap space, the first part is connected to the arc segment on one side of the gap space, and the second part is connected to the arc on the other side of the gap space The acute angle of the first X-shaped connecting segment faces the first notch, and the obtuse angle of the second X-shaped connecting segment faces the second notch. The precise rotation in the Rz direction is realized, the adaptability is strong, and the stability under repeated working conditions is good.

Description

technical field [0001] The invention relates to the technical field of hinges, in particular to a flexible hinge assembly used for micro-rotation of a workpiece table. Background technique [0002] As the core equipment of the semiconductor industry, the lithography machine has high requirements for productivity and overlay accuracy. Its workpiece table needs to meet the multi-free positioning movement under high-speed and high-acceleration conditions to complete alignment, leveling, focusing and exposure. wait for work. [0003] For example, the Chinese invention patent application with the application publication number CN111650816A and the application publication date of 2020.09.11 discloses a flexible connecting device, a measuring system and a lithography machine, and specifically discloses that the flexible connecting device includes a connecting body and a superposition along the Z direction. The first flexible unit and the second flexible unit are arranged in the co...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16C11/12G03F7/20
CPCF16C11/12G03F7/70725
Inventor 吴剑威王辉赵鹏越晏祯卓张银李一帆马亚蕊
Owner HARBIN INST OF TECH
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