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Evaporation source and vacuum evaporation system

A technology of evaporation source and emitter, applied in the field of vacuum evaporation coating, which can solve the problems of low utilization rate of equipment, reduction of production and experiment efficiency, etc.

Pending Publication Date: 2022-05-13
FERMION INSTR SHANGHAI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the traditional evaporation source only includes a single crucible. The crucible of this evaporation source can only be filled with one material at a time, and the utilization rate of the equipment is low. Carry out filling, and then re-evacuate to continue coating, which greatly reduces production and experimental efficiency

Method used

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  • Evaporation source and vacuum evaporation system
  • Evaporation source and vacuum evaporation system
  • Evaporation source and vacuum evaporation system

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Embodiment Construction

[0058] Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. Apparently, the described embodiments are only exemplary embodiments of the present disclosure, not all embodiments.

[0059] In the description of the present disclosure, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", The orientation or positional relationship indicated by "top", "bottom", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the referred device or element must have Certain orientations, constructed and operative in certain orientations, therefore are not to be construed as limitations of the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only, and ...

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PUM

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Abstract

The present disclosure provides an evaporation source, comprising: an evaporation source base comprising a plurality of bearing units for bearing one or more evaporation materials; the heating device is used for heating the evaporation material in the working bearing unit in the plurality of bearing units; and the driving device is connected with the evaporation source base and used for driving the evaporation source base to move so as to switch the work bearing units.

Description

technical field [0001] The disclosure relates to vacuum evaporation coating technology, in particular to an evaporation source and a vacuum evaporation system. Background technique [0002] As an effective method for forming thin films, the vacuum evaporation method has a wide range of applications. [0003] However, the traditional evaporation source only includes a single crucible. The crucible of this evaporation source can only be filled with one material at a time, and the utilization rate of the equipment is low. Carry out filling, and then re-evacuate to continue coating, which greatly reduces production and experimental efficiency. Contents of the invention [0004] The present disclosure provides an evaporation source, comprising: an evaporation source base, including a plurality of carrying units, used to carry one or more evaporation materials; The evaporation material is heated; and the driving device is connected with the base of the evaporation source and i...

Claims

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Application Information

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IPC IPC(8): C23C14/26C23C14/30C23C14/28
CPCC23C14/243C23C14/26C23C14/30C23C14/28C23C14/221
Inventor 阿力甫·库提鲁克梅新灵陈亚男洪巍方农华
Owner FERMION INSTR SHANGHAI CO LTD