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Dummy forming method

A stencil and base plate technology, which is applied in the field of stencil formation of digital laser video discs, can solve the problems of uneven groove depth, unstable laser beam intensity, low energy, etc., and achieve the effect of avoiding uneven groove depth

Inactive Publication Date: 2006-08-02
PRODISC TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, in the above process, laser beams with different energies usually come from the same laser source, and laser beams with different intensities are generated by adjusting the laser source. As a result, when adjusting the laser source, the intensity of the laser beam will vary. Unstable conditions, resulting in uneven depth of grooves, especially when adjusting the laser light source to generate a lower energy laser beam to expose the pre-recorded data area (area B) that does not need to be read positive photoresist

Method used

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Embodiment Construction

[0023] The method for forming a template according to a preferred embodiment of the present invention will be described below with reference to related drawings, wherein the same elements will be described with the same reference symbols.

[0024] Please refer to figure 2 As shown, the method for forming a template according to a preferred embodiment of the present invention includes the following steps: coating a photoresist layer on a substrate (S01), forming a patterned semi-shielding layer on the photoresist layer (S02), Exposing the photoresist layer with a light beam (S03), developing the photoresist layer (S04), and sputtering a metal layer toward the photoresist layer (S05). It should be noted that the template forming method according to the preferred embodiment of the present invention is used for manufacturing an optical disc template, especially an optical disc template for manufacturing a Digital Versatile Disc (DVD).

[0025] In order to make the content of the...

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Abstract

The method includes steps: coating a photoresistive layer on a base plate; forming a patterned semi-blocked layer on the photoresistive layer; exposing the photoresistive layer by a light beam, the semi-blocked layer cuts down energy of light in order to shield the light beam partially; developing photoresistive layer and sputtering a metal layer on direction forward to the photoresistive layer.

Description

technical field [0001] The invention relates to a method for forming a template, in particular to a method for forming a template for a digital laser video disc. Background technique [0002] In the production process of optical discs, it is first necessary to convert the original digital data or signals into laser engraved signals, and then in a dust-free environment, after engraving and electroplating, etc., the masters for mass production of optical discs are manufactured. version (master). Next, the master plate is used to make a stamper for use in subsequent processes. [0003] like Figure 1A As shown, the template 1 of the known DVD-RW is formed in the readable pre-recorded material (Readable Embossed) area (area A) and the unreadable pre-recorded material (Unreadable Embossed) area (area B). For multiple grooves with the same depth, the groove depth H1 is about 25nm-30nm. Next, in order to promote the compatibility of optical discs and optical drives, and to enabl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G11B7/26
Inventor 赖元章
Owner PRODISC TECH INC