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Device and method for transporting products
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A technology for a conveying device and a manufacturing device, which is applied in the field of conveying devices for manufacturing objects, can solve the problems of frequent occurrence of program replacement time, reduction of device production efficiency, and single-piece conveying conveyor belts, etc.
Inactive Publication Date: 2004-10-06
SEIKO EPSON CORP
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Abstract
Description
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[0010] Some of these wafers may not be put into the single-wafer conveyor immediately depending on the status of the manufacturing equipment in the process.
[0011] In addition, the carrier wafers transported by the inter-process transport method are loaded onto the single-wafer transport conveyor in the order of arrival, which may cause frequent program change times and reduce the production efficiency of the device.
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no. 1 Embodiment approach
[0073] Figure 2 shows the figure 1 The conveying apparatus 16 of the manufacturing object in each process 13, 14, 19 shown is enlarged and shown. Since the conveying device 16 of the object to be manufactured has substantially the same structure in each of the steps 13, 14, and 19, the process 14 and the conveying device 16 of the object to be manufactured will be described as a representative with reference to FIG. 2 .
[0074] exist figure 1 In FIG. 2, the carrier 15 conveyed by the inter-process conveying conveyor 11 is a device such as a front opening wafer cassette (FOUP) or wafer cassette, which can seal the wafer.
[0075] The process 14 shown in FIG. 2 is provided corresponding to the inter-process conveyance belt 11 . The process 14 has one sheet conveying conveyor 18 , the plurality of manufacturing devices 23 , 24 , 25 , and 26 described above, and the manufacturing object transfer device 100 .
[0076] The transfer direction in which the wafer transfer belt 18 t...
no. 2 Embodiment approach
[0142] FIG. 9 shows a second embodiment of the conveying device of the object to be manufactured according to the present invention.
[0143] The second embodiment shown in Fig. 9, and Fig. 2 and image 3 The difference of the first embodiment shown is that a total of six transfer robots 40 are arranged as the second transfer section between the single sheet transfer conveyor 18 and the object transfer device 100 .
[0144] Three transfer robots 40 are arranged between positions P5. Similarly, for example, three transfer robots 40 are also arranged between the position P8 and the single sheet conveyance conveyor 18 . One receiving table 400 is provided in a group consisting of three transfer machines 40 . The receiving table 400 is located between one transfer robot 40 on the side of the transfer side portion 210 and two transfer robots 40 on the side of the sheet conveying conveyor 18 . Thus, by providing at least three transfer robots 40 and receiving tables 400, there ar...
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PUM
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Abstract
An intermediate product carrying apparatus is provided for loading a carrier, which is carried between a plurality of process systems and stores a plurality of intermediate products, into the corresponding process system, and then transferring the plurality of intermediate products of the carrier to a single wafer carrying conveyer, which carries the intermediate products in a single wafer state to an intermediate product manufacturing apparatus provided in the process system. The intermediate product carrying apparatus comprising: an intermediate product transfer means provided in the process system, for loading the carrier, which is carried between process systems and which stores the plurality of intermediate products, into the corresponding process system, and transferring the intermediate products.
Description
technical field [0001] The present invention relates to a conveying device and an object for taking in a carrier containing a plurality of objects to be manufactured transported between a plurality of processes, changing the order or combination of the objects to be manufactured in the carrier, and transferring the object to be manufactured transport method. Background technique [0002] For example, semiconductor manufacturing apparatuses for manufacturing semiconductor wafers (hereinafter referred to as wafers) to be manufactured include various wafer manufacturing apparatuses such as photolithography apparatuses, film forming apparatuses, etching apparatuses, cleaning apparatuses, and inspection apparatuses. [0003] During the process from a certain semiconductor manufacturing equipment group to another semiconductor manufacturing equipment group, the wafer is transported in a state of being housed in a housing member called a carrier. Then, after taking out the wafer f...
Claims
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Application Information
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