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Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event

A technology of contingencies and conveying systems, applied in the direction of conveyor control devices, electrical components, furnace components, etc., can solve problems such as increasing substrate manufacturing costs

Inactive Publication Date: 2014-01-08
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Substrates present in the fabrication facility at WIP represent a significant investment in working capital, which tends to increase the fabrication cost per substrate

Method used

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  • Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
  • Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
  • Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event

Examples

Experimental program
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Effect test

Embodiment Construction

[0042] The wafer carrier handler in the wafer loader includes a horizontal guide that moves vertically along parallel vertical guides, and an end effector that moves horizontally along the horizontal guides. To unload wafer carriers from a moving conveyor that transports wafer carriers (wafer carrier conveyor) and past the wafer loading device, moves along a horizontal guide at a velocity that substantially matches the wafer carrier (e.g., in a horizontal direction that substantially matches the wafer carrier velocity) end effector. Additionally, the end effector is maintained in position adjacent to the wafer carrier. Thus, when the end effector sufficiently matches the velocity of the wafer carrier, it sufficiently matches the position of the wafer carrier. Likewise, conveyor positions and / or velocities can be adequately matched.

[0043] When the end effector sufficiently matches the wafer carrier velocity (and / or position), raise the end effector by moving the horizontal...

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PUM

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Abstract

In a first aspect, a wafer loading station adapted to exchange wafer carriers with a wafer carrier transport system comprises a biasing element adapted to urge the end effector of the wafer loading station away from a movable conveyor of the wafer carrier transport system upon the occurrence of a unscheduled event such as a power failure or an emergency shutdown. In a second aspect, an uninterruptible power supply commands a controller to cause the wafer carrier handler to retract the end effector from the wafer carrier transport system upon the occurrence of unscheduled event, and provides the power necessary for the same. Numerous other aspects are provided.

Description

[0001] This application relates to U.S. Patent Application Serial No. 10 / 650,480 filed on August 28, 2003, entitled "Substrate Carrier Handler That Unloads Substrate Carriers Directly From a Moving Conveyor" (Attorney Docket No. 7676), It claims priority to US Provisional Application Serial No. 60 / 407463, filed August 31, 2002, and US Provisional Application Serial No. 60 / 443004, filed January 27, 2003. [0002] This application also claims priority to US Provisional Patent Application Serial No. 60 / 520,140, ​​filed November 13, 2003, the entire contents of each of which are hereby incorporated herein by reference. [0003] Cross References to Related Applications [0004] This application is related to the following generally designated, co-pending US patent applications, the entire contents of each of which are hereby incorporated by reference for all purposes. [0005] U.S. Patent Application No. 10 / 650,310, filed August 28, 2003, and entitled "System For Transporting Substr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B65G49/05B65G43/00H01L21/00H01L21/68
CPCH01L21/67276H01L21/6773H01L21/68707
Inventor 迈克尔·R·赖斯埃里克·A·恩格尔哈德特罗伯特·B·劳伦斯马丁·R·埃里奥特杰弗里·C·赫金斯
Owner APPLIED MATERIALS INC