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Turnable device for spin-coating

A technology of turntable and surface coating, applied in the direction of recording/reproducing by optical method, instrument, optical recording carrier, etc., can solve the problem of leakage of photocurable resin, and achieve the effect of simple device and simple coating process

Inactive Publication Date: 2007-02-14
LG CHEM LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the disc has a hole in its center, the photocurable resin released at the center can leak into the hole

Method used

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  • Turnable device for spin-coating
  • Turnable device for spin-coating
  • Turnable device for spin-coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0078] A polycarbonate (PC) optical disc substrate having a total thickness of 1.1 mm, an outer diameter of 120 mm, and an inner diameter (diameter of a central hole) of 15 mm was molded by injection molding. Then, silver alloy / ZnS-SiO / SbGeTe / ZnS-SiO was formed by sputtering 2 four-layer structure.

[0079] Afterwards, fix the disc on the image 3 Shown in the upper part of the turntable, the compression plate 63 is lowered so that the elastic body 65 completely closes the central hole B. The elastic body 65 is an SBR with a diameter of 14.6 mm.

[0080] Next, while the disc is rotating, photocurable resin EB8402 (manufactured by SK UCB), Irgacure184 (manufactured by Ciba SC), or Irgacure651 (manufactured by Ciba SC) is discharged to the center upper portion of the optical disc, and then moved up from the turntable 53 The optical disc is separated, thereby completing the manufacturing process of the optical disc. As a result, with the use of figure 2 Compared with the ca...

Embodiment 2

[0082] In addition to using Figure 5 Except for the elastomer 65 shown, an optical disk was produced in the same manner as in spin-coating Example 1. As a result, with the use of figure 2 Compared with the case of the cover 15 shown, the coating time was shortened, the central portion of the disc was not contaminated, and a uniform coating was produced.

Embodiment 3

[0084] In addition to the action of the squeeze plate 63 by reference Image 6 Except for the control of the electromagnet 85 described, an optical disc was manufactured in the same manner as in spin coating Example 1. As a result, with the use of figure 2 Compared with the case of the cover 15 shown, the coating time was shortened, the central portion of the disc was not contaminated, and a uniform coating was produced.

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Abstract

Provided is a turntable device for spin-coating a substrate having a central hole formed in the central portion thereof with an external coating material due to a centrifugal force by rotating the substrate. The turntable device includes: a support unit having a flat surface that has at least one vacuum hole which supply vacuum force to the substrate for fixedly supporting the substrate on the horizontal surface; an elastic body disposed at the center of the support unit to be inserted into the central hole of the substrate that is fixedly supported on the surface of the support unit, and closing the central hole by being elastically deformed due to an external force; and a pressing member disposed on the elastic body and pressing the elastic body to deform the elastic body elastically. Since an additional element for closing the central hole of the substrate during spin-coating is not required, the apparatus is simple, the coating process is simple, and the central portion of the substrate is prevented from being contaminated after the spin-coating.

Description

technical field [0001] The present invention relates to a turntable device for spin coating various substrates including optical discs. Background technique [0002] Optical discs are widely used as information recording media for optical pickups that record and reproduce information in a non-contact manner. Examples of the optical disc include a compact disc (CD) with a storage capacity of 600-800 MB and a digital versatile disc (DVD) with a storage capacity of 4-10 GB. Efforts have been made to develop optical discs with a higher degree of data integration. [0003] Recently, in order to store more data and obtain higher audio and video quality, using a 405nm blue laser, a Blu-ray disc (BD) or a high-definition-digital versatile disc ( HD-DVD). [0004] In order to increase the recording density of an optical disc, various methods are used. One possibility for this is to minimize the size of the light spot, which is achieved by controlling the wavelength of the laser a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11B7/26
CPCG11B7/266
Inventor 姜太植李成根洪瑛晙
Owner LG CHEM LTD