Thin-film piezoelectric material element, head gimbal assembly and hard disk drive
a piezoelectric material and head gimbal technology, applied in the direction of piezoelectric/electrostrictive/magnetostrictive devices, electrical equipment, disposition/mounting of recording heads, etc., can solve the problems of space for accommodating the opening and the inability to secure the electrode layer
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
modified example 1
[0140]Subsequently, the thin-film piezoelectric material element 42b according to the modified example 1 will be explained with reference to FIG. 9 to FIG. 12. Here, FIG. 9 is a plan view, similar with FIG. 5, showing the thin-film piezoelectric material element 42b and the peripheral part according to the modified example 1. FIG. 10 is a sectional view taken along the line 10-10 in FIG. 9, FIG. 11 is a sectional view taken along the line 11-11 in FIG. 9. FIG. 12 is a sectional view, similar with FIG. 10, showing the thin-film piezoelectric material element 42b, connected to the suspension pad 26 by the connecting electrode 18b. Note that the connecting electrode 18b is omitted in FIGS. 9-11 for convenience of illustration.
[0141]The thin-film piezoelectric material element 42b are different in that it has upper, lower electrode pads 34A, 34B instead of upper, lower electrode pads 24A, 24B, as compared with the thin-film piezoelectric material element 12b.
[0142]The upper electrode p...
modified example 2
[0156]Subsequently, the thin-film piezoelectric material element 52b according to the modified example 2 will be explained with reference to FIG. 13 to FIG. 16. Here, FIG. 13 is a plan view, similar with FIG. 5, showing the thin-film piezoelectric material element 52b and the peripheral part according to the modified example 2. FIG. 14 is a sectional view taken along the line 14-14 in FIG. 13, FIG. 15 is a sectional view taken along the line 15-15 in FIG. 13. FIG. 16 is a sectional view, similar with FIG. 14, showing the thin-film piezoelectric material element 52b, connected to the suspension pad 26 by the connecting electrode 18b. Note that the connecting electrode 18b is omitted in FIGS. 13-15 for convenience of illustration.
[0157]The thin-film piezoelectric material element 52b are different in that it does not have upper, lower electrode pads 24A, 24B, as compared with the thin-film piezoelectric material element 12b.
[0158]However, the connecting electrode 18b, 18b are formed ...
modified example 3
[0161]Subsequently, the thin-film piezoelectric material element 62b according to the modified example 3 will be explained with reference to FIG. 17 to FIG. 20. Here, FIG. 17 is a plan view, similar with FIG. 5, showing the thin-film piezoelectric material element 62b and the peripheral part according to the modified example 3. FIG. 18 is a sectional view taken along the line 18-18 in FIG. 17, FIG. 19 is a sectional view taken along the line 19-19 in FIG. 17. FIG. 20 is a sectional view, similar with FIG. 19, showing the thin-film piezoelectric material element 62b, connected to the suspension pad 26 by the connecting electrode 18b. Note that the connecting electrode 18b is omitted in FIGS. 17-19 for convenience of illustration.
[0162]The thin-film piezoelectric material element 62b are different in that it has upper, lower electrode pads 44A, 44B instead of upper, lower electrode pads 24A, 24B, as compared with the thin-film piezoelectric material element 12b.
[0163]The upper electr...
PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More