The invention provides a process method for inhibiting generation of micro-nano structure
machining burrs, and relates to the field of workpiece micro-
machining. According to the process method for inhibiting the generation of the
processing burrs, a UV light-cured film is used as a protective layer, and the generation of the burrs is inhibited by combining solution cleaning and
plasma cleaning. The method specifically comprises the steps that a UV
light curing protection layer is prepared through a UV
light curing and hot
drying method before
machining, and lateral plastic flowing of a boundary material of a machined part is restrained through the
protection layer, so that burrs are only generated on the surface of the
protection layer material; according to a
processing material and the size of the micro-nano structure, the thickness of the protective layer is controlled through the spin-
coating rotating speed, and the
hardness of the protective layer is regulated and controlled by controlling the photocuring and hot
drying time; and then,
processing of the micro-nano structure is achieved through ultra-precision
cutting, finally, a solution and
plasma combined two-step cleaning method is used for removing
photoresist and removing the protective layer, a burr-free
smooth surface structure is obtained, and therefore burr inhibition suitable for the
cutting process of the micro-nano structures of various materials is achieved.