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Switching device, in particular for optical applications

A switch device and switch position technology, applied in the field of MEMS, micro-electro-mechanical systems, can solve the problems of increasing complexity and cost

Inactive Publication Date: 2008-02-13
DIBCOM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this solution increases the complexity of the manufacture of the device and its cost
In addition, excessive wear of this cover inevitably produces the above-mentioned stiction problem

Method used

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  • Switching device, in particular for optical applications
  • Switching device, in particular for optical applications
  • Switching device, in particular for optical applications

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0036] Fig. 3 schematically shows a switchgear constituting a first embodiment of the present invention. The moving element 2 comprising a shield in the form of a metal plate 20 is attached to an elastic rod or beam 3 . The other end of the elastic beam 3 is fixed into an anchor point or base 4 .

[0037] As shown in Figure 3, the elastic beam 3 extends at a zero point or equilibrium position O along an axis "X" indicated for explanatory purposes. The filter plate 20 and the beam 3 form an oscillating mechanical system in which the filter plate 20 can be moved back and forth in a direction substantially parallel to the axis "y" between two predetermined switch positions indicated here by parameters A and B , the axis "y" is perpendicular to the axis "x". It should be understood that only one or more than two predetermined switch positions may be defined. According to this embodiment, it can actually be noticed that the path followed by the track of the filter plate is curved ...

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PUM

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Abstract

There is described a switching device comprising a mobile element (2) that is able to at least move back and forth along a defined trajectory between a zero position (O) and at least one predetermined switching position (A, B), an elastic member (3, 30, 32) connecting the mobile element to a base (4) and at least one stationary actuating electrode (5, 6) located in the vicinity of the predetermined switching position for producing electrostatic forces to cause the mobile element to move to and / or away from the predetermined switching position. The stationary actuating electrode is disposed to act on at least one edge (20a) of the mobile element which is substantially parallel to the mobile element's trajectory. The geometry of the mobile element, elastic member and actuating electrode is such that the mobile element cannot come into contact with the actuating electrode and that the switching position is defined by an equilibrium point (E) between lateral electrostatic forces produced on the mobile element by the stationary actuating electrode and mechanical springs forces produced by the elastic member.

Description

technical field [0001] The present invention generally relates to microelectromechanical systems, or so-called MEMS. More specifically, the invention relates to a switching device comprising a moving element movable back and forth along a defined track between a zero position and at least one predetermined switching position, the moving element being connected to A resilient member of a base, and at least one fixed actuation electrode located adjacent to said at least one predetermined switch position. The invention also relates to a method for operating a switching device as described above and a switching unit comprising at least one such switching device. Background technique [0002] A wide variety of micromechanical structures are known which respectively influence or switch the beam path. The purpose of these structures is to control, process and / or store data from pixel-based images. [0003] European patent application 0510629 discloses a deflectable device based ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/02G02B6/35
Inventor 卡特森·安德伯格克劳德·波尔吉斯
Owner DIBCOM