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Anti-creep driving method of piezoelectric ceramic driver

A driving method and piezoelectric ceramic technology, which are applied in the directions of generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc., can solve the problem that the compensation accuracy cannot be very good for ultra-high-precision positioning control and other issues, to achieve the effect of reducing creep error, fast, accurate and precise positioning control

Inactive Publication Date: 2009-06-03
HEFEI UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the way people eliminate it is generally to use closed-loop control to compensate it in the control process, but due to the limitation of displacement detection components, its compensation accuracy cannot well meet the requirements of ultra-high precision positioning control

Method used

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  • Anti-creep driving method of piezoelectric ceramic driver
  • Anti-creep driving method of piezoelectric ceramic driver
  • Anti-creep driving method of piezoelectric ceramic driver

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Embodiment Construction

[0017] see figure 1 , the creep of the piezoelectric ceramic driver is divided into two stages: the first ten seconds after the voltage is applied is the first stage, and the 90-degree electric domains in the crystal affect each other when they start to turn, and the deformation lags to produce the amplitude of the creep It is the main factor affecting the creep error of piezoelectric ceramics; as time goes by, in the second stage, the number of 90-degree electric domains with deformation lag decreases, the creep value gradually decreases, and the deformation of piezoelectric ceramics slows down.

[0018] see image 3 , Figure 4 , in view of the creep characteristics of piezoelectric ceramics, this embodiment sets a two-stage reverse pressure driving method: that is, according to the needs of the displacement, after the driving voltage is applied to a specified value, and then according to the change in the driving voltage, that is, The size of the displacement, choose diff...

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Abstract

This invention relates to a drive method for anti-creeping of piezoelectric ceramic drivers characterizing in setting two stages of reverse pressure application, after the drive voltage is varied in terms of DeltaV, it applies reverse voltages in steps according to a first stage and a second stage, in which, in the first stage, it applies reversely a step drive voltage with the variance amplitude of a1 and period of b1, in the second stage, it applies reversely a step drive voltage with the variance amplitude of a2 and the period of b2, in which, a1 is greater than a2, b1 is smaller than b2.

Description

Technical field: [0001] The invention relates to a driving method of a piezoelectric ceramic driver. Background technique: [0002] Micro-displacement technology is one of the key technologies of precision machinery and precision instruments. With the development of science and technology, there is an urgent need for high-precision micro-motion worktables in the fields of aerospace, biology, optics, and microelectronics. Most of the micro-motion worktables use piezoelectric ceramic drivers, and the most widely used ones are multilayer piezoelectric ceramic drivers that are polarized in mechanical series and electrical parallel. The piezoelectric ceramic driver has the advantages of high displacement resolution, small size, fast response, large output force, and no heat generation, but its inherent hysteresis, creep, and nonlinearity seriously affect its application. The creep error of the piezoelectric ceramic driver produced by German PI company has also reached 1% to 2%. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/00
Inventor 余晓芬范伟
Owner HEFEI UNIV OF TECH